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Research on field calibration method of straightness in five-degree-of-freedom measurement
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摘要:
直线度现场标定是保证其在线测量精度的重要方法。在收发一体式激光五自由度测量结构的基础上，针对直线度现场标定中标定平台引入的阿贝误差和角锥棱镜成像误差，建立了直线度现场标定模型。根据该标定模型并结合五自由度测量装置的角度测量结果，提出一种直线度现场标定误差补偿方法。实验表明，该标定方法使标定系数误差减小到0.2%以内，有效提高了直线度现场标定精度。
Abstract:The field calibration of straightness is an important method to ensure the accuracy of on-line measurement. Based on the transceiver integrated laser five-degree-of-freedom measurement structure, the field calibration model was established aiming at the Abbe error, and the imaging error of retroreflector caused by the calibration platform. According to the calibration model and the angle measurement results of the five-degree-of-freedom measuring device, a compensation method of straightness calibration errors was proposed. Experimental results showed that the calibration coefficient error was within 0.2% when using the calibration method, and the calibration errors of straightness were effectively reduced. The calibration method made the error of calibration coefficient reduce to less than 0.2%, and effectively improved the accuracy of straightness field calibration.
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Overview: The multi-degree-of-freedom measurement is one of the important methods to realize the rapid and high-precision measurement of geometric errors of machine tools. Straightness measurement, as an important part in the multi-degree-of-freedom measurement, directly affects the accuracy of error measurement of the machine tools. At present, the straightness measurement based on laser collimation has been widely used in multi-degree-of-freedom measurement systems. When the measuring device is applied in the field, the field calibration can effectively eliminate the system error caused by the installation and adjustment of the measuring device, change of environmental parameters, stress, and abrasion in the field application. But the precision and stability of the calibration platform are uncertain in the field calibration of straightness, so the calibration error caused by the calibration platform cannot be ignored.
In the five-degree-of-freedom measuring structure of laser transceiver, the straightness is measured based on the laser collimation principle, and the inverse reflection characteristics of the retroreflector. QPD1 (quadrant photodiode detector) is used to detect the location of the light spot. When using the laser interferometer to calibrate the straightness, the X-direction output and the Z-direction output of QPD1 need to be calibrated. In the field calibration of straightness, the angle of calibration platform would change. The Abbe error caused by the different measuring points of laser interferometer and straightness would affect the calibration accuracy, and it is determined by the Abbe deviation and the angle change of calibration platform. In addition, when the angle of calibration platform changes, the imaging error of retroreflector is part of the calibration errors according to the principle of parallel plate expansion of retroreflector. The field calibration model was established aiming at the calibration errors caused by the calibration platform. According to the calibration model and the angle measurement results of the five-degree-of-freedom measuring device, a compensation method of straightness calibration error was proposed.
In the calibration experiment, the X-direction output and Z-direction output of QPD1 in the five-degree-of-freedom measuring device was calibrated with laser interferometer. A low-precision calibration platform was used to simulate the field calibration environment, and a high-precision calibration platform with negligible angle change was used for comparison experiment. Experimental results showed that the calibration coefficient error of the X-direction straightness was reduced from 3.5% to less than 0.1% and the calibration coefficient error of the Z-direction straightness was reduced from 4% to less than 0.2%. The Abbe error and the imaging error of retroreflector were eliminated and the calibration accuracy of straightness was effectively improved.
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图 2 QPD1的X向输出标定原理图
Figure 2. Schematic diagram of X-direction output calibration of QPD1
图 3 QPD1的Z向输出标定原理图
Figure 3. Schematic diagram of Z-direction output calibration of QPD1
图 9 低精度标定平台标定结果。(a)补偿前; (b)补偿后
Figure 9. Calibration results of low precision calibration platform. (a) Before compensation; (b) After compensation
图 11 高精度标定平台标定结果
Figure 11. Calibration results of high precision calibration platform
图 12 低精度标定平台标定结果。(a)补偿前；(b)补偿后
Figure 12. Calibration results of low precision calibration platform. (a) Before compensation; (b) After compensation
图 13 二维直线度测量对比实验系统
Figure 13. Measurement and comparison experiment system of two-dimension straightness
图 14 二维直线度测量对比实验结果。(a) X向直线度；(b) Z向直线度
Figure 14. Measurement and comparison experiment results of two-dimension straightness. (a) Straightness along X axis; (b) Straightness along Z axis
表 1 高精度标定平台标定数据
Table 1. Calibration data of high precision calibration platform
激光干涉仪测量值∆dx'/μm QPD1 X向输出测量值∆xQ -125.1 -109.192 -99.48 -86.972 -74.77 -65.187 -49.36 -42.669 -24.95 -21.426 0.00 0.000 25.58 21.682 49.99 42.886 75.41 65.364 100.15 87.189 125.23 109.037 
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表 2 低精度标定平台标定数据
Table 2. Calibration data of low precision calibration platform
激光干涉仪测量值∆dx'/μm QPD1 X向输出测量值∆xQ 偏摆角测量值εzx/(μm/m) -123.85 -112.824 -658 -99.4 -90.429 -525 -74.05 -67.054 -380 -49.66 -44.541 -260 -24.02 -21.265 -129 0.00 0.000 0 24.98 22.105 107 50.17 44.647 223 76.21 68.135 336 101.08 90.835 452 126.08 113.493 518
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表 3 高精度标定平台标定数据
Table 3. Calibration data of high precision calibration platform
激光干涉仪测量值∆dz'/μm QPD1 Z向输出测量值∆zQ -124.65 -112.888 -100.2 -90.493 -74.85 -67.118 -50.46 -44.305 -24.82 -21.329 -0.8 -0.064 24.18 22.041 49.37 44.583 75.41 68.071 100.28 91.171 125.28 113.929
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表 4 低精度标定平台标定数据
Table 4. Calibration data of low precision calibration platform
激光干涉仪测量值∆dz'/μm QPD1 Z向输出测量值∆zQ 偏摆角测量值εxz/(μm/m) -125.07 -118.527 -203 -100.21 -94.950 -207 -74.75 -70.262 -153 -50.16 -46.593 -108 -25.01 -22.453 -58 -0.2 1.161 -3 24.99 24.487 27 50.41 47.717 58 75.29 70.558 86 100.41 93.942 111 124.89 117.077 134
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