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摘要:
偏振作为光的基本特性之一，其产生、调控和探测被广泛应用于通信、成像、光学加密等领域。然而传统的偏振器件存在体积大、集成度低等问题。亚波长尺度的超表面由于其独特的光场调控机制，为偏振器件的小型化和低成本提供了创新性的解决方案。本文对近年来基于超表面的偏振器件研究进展及超表面制备工艺进行综述。从超表面相位调控机理入手，简单介绍了传输相位、几何相位、广义几何相位和共振相位的调控方法，重点总结了偏振转换、偏振分束、矢量涡旋光发生器、高阶庞加莱球光学加密、偏振多通道全息、偏振探测等不同超表面偏振器件及其制备工艺，最后展望了该领域可能的发展趋势和应用前景。
Abstract:Polarization, as one of the basic characteristics of light, is widely utilized in communication, imaging, optical encryption, and other fields. However, traditional polarization devices face numerous problems such as large size and low integration. Due to their unique light field manipulation mechanisms, subwavelength-scale metasurfaces offer innovative solutions for miniaturization and cost reduction of polarization devices. This paper reviews recent advances in metasurface-based polarization devices and fabrication techniques. Starting from the phase manipulation mechanisms of metasurfaces, the article briefly introduces methods for controlling the transmission phase, geometric phase, generalized geometric phase, and resonance phase. The focus is summarizing various metasurface polarization devices and their fabrication, including polarization conversion, polarization beam splitting, vector vortex beam generators, high-order Poincaré sphere optical encryption, polarization multi-channel holography, and polarization detection. Finally, we discuss potential development trends and application prospects in this field.
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Key words:
- polarization device /
- metasurface /
- polarization detection /
- multifunction /
- phase regulation
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Overview: Polarization devices are significant optical components in polarized optical systems such as optical information processing, optical measurement, polarization detection, and communication. Traditional polarizers rely on the birefringence effect of natural crystals or the polarization selectivity of multilayer film structures, which requires accumulated optical path differences to achieve phase control. The inherent characteristics of the former necessitate significant thickness to separate the two polarization states, while the latter, as an alternative, significantly reduces thickness but involves a complex manufacturing process and offers high extinction ratios only within narrow bands and at small incident angles. These defects greatly restrict the development and application of these polarizers. Metasurface, as a novel type of optical field modulator, is generally composed of sub-wavelength meta-atom arrays. It can introduce phase discontinuities and enable precise control of the polarization state of incident light. Metasurface polarization devices meet the quality of the optical field and have the advantages of small size, lightweight, high design freedom, and tunable bandwidth, unveiling fascinating approaches to develop the next-generation on-chip polarization devices. In this paper, the basic process of designing metasurface polarization devices is discussed. Furthermore, four different meta-atom polarization modulation methods are introduced. As the basic units of metasurfaces, the polarization characteristics of meta-atoms are crucial for designing metasurfaces with specific polarization responses. Besides, common homogeneous polarization states and more complex types such as radial vector beams and azimuthal vector beams are introduced, which have unique advantages and application value in fields such as optical communication and microscopy imaging. Then, the research progress of different polarization devices is discussed in detail. Finally, the metasurface fabrication technologies are discussed. Overall, this review presents the principle, development, and fabrication in an all-around way, focusing on the various applications of metasurface polarizers in planar optical devices, and puts forward the existing problems and possible solutions in the design and processing of metasurface polarization devices.
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图 1 (a) 庞加莱球示意图；(b)线偏振与圆偏振在庞加莱球上的表示
Figure 1. (a) Schematic image of the Poincaré sphere; (b) Representation of LP and CP on a Poincaré sphere
图 3 (a) 传统折/反射示意图；(b) 广义反射定律示意图；(c) 广义折射定律示意图
Figure 3. (a) Schematic image of the traditional Snell’s law; (b) Schematic image of generalized refraction law; (c) Schematic image of generalized reflection law
图 4 (a) 等离子体超表面偏振转换示意图[67]；(b) 等离子体超表面偏振转换器单元结构及其计算的反射系数和相位曲线图[67]；(c) 四种纳米结构随角度θ变化的计算线偏振度及线偏振角曲线[67]；(d) 所制备的超表面偏振转换器SEM图[67]
Figure 4. (a) Schematic image of plasma metasurface polarization conversion[67]; (b) Plasma metasurface polarization converter cell structure and calculated reflection coefficient and phase curve[67]; (c) Calculated degree of linear polarization (DoLPs) and angle of linear polarization (AoLPs) of the four designed nano structures as a function of the rotation angle of θ[67]; (d) SEM image of the fabricated metasurface polarization conversion[67]
图 5 (a) 熔融石英衬底上的TiO2纳米柱超表面示意图(左)和SEM(右)图像[72]；(b) LP偏振入射下仅用传输相位调控示意图(左)，透射系数图和相移图(右)[72]；(c) CP偏振入射下用传输相位和PB相位同时调控示意图(左)，透射系数图和相移图(右)[72]；(d) 全Stokes探测实验装置示意图[72]；(e) 庞加莱球面上所选的六组基偏振态入射下超表面的实验和模拟强度分布以及相应Stokes参数重建[72]
Figure 5. (a) Schematic (left) and SEM (right) image of the designed metasurface consisting of TiO2 nanopillars on a fused-silica substrate[72]; (b) Schematic of the LP polarization manipulation (left), which employs only the propagation phase. The transmission coefficient and phase shift (right)[72]; (c) Schematic of the CP polarization manipulation (left) achieved by combining propagation and PB phases. The conversion efficiency and phase shift (right)[72]; (d) Experimental setup for full-Stokes polarimetry[72]; (e) The experimental and simulated intensity distributions of the metasurface and corresponding reconstructed Stokes parameters for the selected six basis polarization states on a Poincaré sphere[72]
图 6 (a) 具有偏振相关的同轴宽带消色差聚焦涡旋光发生器生成示意图[82]；(b) 偏振控制的涡旋光发生器SEM图[82]；(c)测量所制备超器件的实验系统示意图[82]；(d) 涡旋光发生器性能表征[82]
Figure 6. (a) Schematic illustration of the the on-axis broadband achromatic focusing optical vortex generator (BAFOV) generation with polarization-dependent functions[82]; (b) SEM images of the fabricated polarization-controlled BAFOV[82]; (c) Schematic illustration of the characterizing system for the measurement of fabricated metadevices[82]; (d) Performance of the BAFOV generator[82]
图 7 (a) Meta-VCSELs示意图[84]；(b) 通过将各向异性超原子操作为纳米半波片，在庞加莱球上可实现的偏振态[84]；(c) 矢量涡旋光束的产生[84]
Figure 7. (a) Schematic of Meta-VCSELs[84]; (b) The achievable polarization states on the Poincaré sphere in this example by operating the anisotropic meta-atoms as nano half-waveplates[84]; (c) Generations of vector vortex beams[84]
图 8 (a) 手性超构表面自旋解耦相位调控示意图[93]；(b) 级联超构表面生成、调控高维庞加莱光束的概念图[93]；(c) 级联超构表面阵列光学加密方案示意图[93]
Figure 8. (a) Schematic of phase control of spin decoupling on chiral metasurfaces[93]; (b) Conceptual illustration of generating multi-channel perfect HDPBs via cascaded chiral metasurfaces[93]; (c) Optical encryption demonstration based on cascaded metasurfaces[93]
图 9 (a) 基于介电超表面的偏振多路复用全息图示意图[98]；(b) 观察全息图像实验装置图[98]； (c) 多通道矢量全息仿真及实验结果[98]
Figure 9. (a) Schematic illustrations of polarization multiplexed holograms based on dielectric metasurfaces[98]; (b) The experimental setup for the observation of the holographic images[98]; (c) Simulated and experimental results for the multichannel vectorial holography[98]
图 10 (a) 用于任意平行偏振态分析的矩阵光栅示意图和SEM图像[104]；(b)任意Stokes偏振态测量装置示意图表示[104]； (c)所选阶次偏振测量对比度[104]
Figure 10. (a) Schematic image and SEM of matrix gratings for arbitrary parallel polarization analysis[104]; (b) Schematic image of the measurement of the arbitrary state Stokes polarization state[104]; (c) The polarization contrast of each order is shown[104]
图 11 (a) 近红外全Stokes探测装置示意图[106]；(b) Z字型圆偏振滤波器示意图，可透过RCP(绿色)并阻挡LCP(蓝色)[106]；(c)SEM图[106]；(d) CP滤波器表征的测量装置示意图[106]；(e) CP光的透射光谱和相应的圆二色性曲线(上)，TM和TE偏振光的透射光谱和消光比曲线(下)[106]
Figure 11. (a) Schematic of setup for near-infrared full-Stokes detection[106]; (b) CP filter with the Z-shaped pattern, which transmits RCP light (green) and blocks LCP light (blue)[106]; (c) Scanning electron microscope (SEM) image[106]; (d) Schematic of the measurement setup for CP filter characterization[106]; (e) Transmission spectra and corresponding circular dichroism (CD) of CP light (top) and transmission spectra and extinction ratio of TM and TE polarized light (down)[106]
图 12 (a) 具有双工作波长的CMOS集成全Stokes偏振成像仪示意图[111]；(b) 用于生成任意偏振态以进行完整斯托克斯偏振检测的定制实验装置示意图[111]；(c) 垂直耦合双层光栅的透射率及线性消光比曲线(左)，手性超表面在530~700 nm和480~530 nm处的透射率和消光比曲线(右)[111]；(d) 所有超表面偏振滤光片阵列像素分别在特定偏振状态下红光和绿光垂直入射和斜入射时的偏振角、线偏振度和圆偏振度检测误差分布[111]；(e) 全斯托克斯偏振CMOS成像传感器[111]
Figure 12. (a) Schematic of CMOS integrated full Stokes polarimetric imager with dual operation wavelength[111]; (b) A schematic of the customized experimental setup for generating arbitrary polarization states for full Stokes polarization detection[111]; (c) Measured transmission and LPER of fabricated vertically coupled double-layered gratings (VCDG) (left) and measured transmission and CPER of the chiral metasurface at 530~700 nm and 480~530 nm, respectively (right)[111]; (d) The angle of polarization (AOP), the degree of linear polarization (DOLP), and the degree of circular polarization (DOCP) detection error distributions of all metasurface polarization filter array pixels for the specific polarization state at normal incidence and oblique incidence of red color (left) and green color (right)[111]; (e) Image of full Stokes polarimetric CMOS imaging sensor[111]
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