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摘要:
矢量光场领域在过去20年出现了众多重要进展。考虑到多篇综述介绍了矢量光场产生方法以及调控技术，作者仅以矢量涡旋光场为线索总结了其在激光减材、改性以及增材等微纳加工领域的典型应用，回顾了矢量涡旋光在材料表面和内部的微纳结构加工、光存储以及立体微结构光刻等应用中的部分关键进展。详细介绍了基于定制光场的图案化光致表面周期结构以及立体微结构快速双光子光刻的原理与技术。最后，总结了矢量涡旋光场在激光微纳加工中的优势与挑战，展望了其在未来将赋能更多复杂应用。
Abstract:In the past two decades, numerous significant advances have been achieved in the realm of the vector beams. Considering numerous published reviews already covering diverse topics in terms of generating and/or manipulating unprecedented vector beams, we summarize the typical applications of vector vortex beams in the topics of laser micro-nano processing for material modification, subtractive and additive manufactures. This paper reviews part of the critical advances in fabricating micro-nano structures on the surface and inside the materials, optical information storage and rapid fabrication of microstructures with the stereolithography based-on vector vortex beams. Particular cares are focused on the principles and technologies in applications of patterned laser-induced periodic surface structures and rapid two-photon polymerization of three-dimensional microstructures based on customized vector vortex beams. Finally, we summarize the advantages and challenges of vector vortex beams in laser micro-nano processing, and we also anticipate that more vector light fields will enable more complex applications in the future.
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Key words:
- vector beams /
- vortex beams /
- laser micro/nano-machining /
- laser applications
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Overview: The optical vortex beams are specially-structured light fields with helical wavefronts expressed as exp (imϕ), where m represents the topological charge with ϕ defined as the azimuthal angle. Further, the concepts of vector vortex beams are naturally developed with their polarization states varying across the fields. Simultaneously, richer application scenarios are expected from vortex beams due to their phase singularities and additional degrees of freedom in the angular momentum and/or polarization states. This article reviews the major advances in laser material processing with vector vortex beams since the beginning of this century. Typical fabricating schemes for additive, subtractive manufactures and material modifications are summarized. In section 2, the advances in the subtractive and material modifications are categorized into three sub-sections as: microstructure imprinted on the surface, microstructures inscribed inside the material and the applications in the optical storage. As numerous techniques to generate these novel beams were available in 2000s, vector vortex beams were soon applied to imprint laser-induced periodic surface structure (LIPSS) patterns due to the well-known relations of LIPSS with local polarization states of laser beams. In subsection 2.1, we survey the works on LIPSS induced by vector vortex beams on the surfaces of glass, silicon and metals, i.e. three common materials of dielectric, semiconductor and conductor. Commercially available ultrafast Ti:Sapphire lasers delivering femtosecond pulses are mostly employed in these activities due to the possibility to induce multiscale micro/nanostructures. Besides, several works to induce vortex-related microstructures are also included. In subsection 2.2, advances in hole drilling with either expected or unexpected concomitant results by Bessel beams are reviewed. Since applying the novel vector vortex beams in the optical storage is a related cutting-edge topic but still in development, simulations and conception advances in this topic are surveyed in subsection 2.3. Section 3 is devoted to the related works on additive fabrications. The concept and recent advances in optical caustics of vortex beams are briefly introduced in subsection 3.1. Compared with the 3D point-by-point scanning scheme, further applications based on flexibly shaped vortex beams reviewed in subsection 3.2 are presented to significantly accelerate the fabricating speed by more than two orders of magnitudes. Miscellaneous works with other vector beams are introduced in section 4. Finally, we discuss the limitations of the current advances and we envision that the applications of vector vortex beams will be further developed through richer collaborations of professionals in various fields.
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图 2 紧聚焦涡旋飞秒光场在玻璃材料的加工结果。(a)利用线偏振激光烧蚀加工的百纳米宽微环缝结构[16]；利用 (b)混合偏振态和 (c)径向与角向偏振态激光在熔石英玻璃表面加工的偏振敏感结构[17]
Figure 2. Machining results on glass with tightly focused vortex beams. (a) Annular rings ablated by linearly polarized beams[16]; Polarization-sensitive structures produced on fused silica galss with (b) mixed and (c) radially- or azimuthally-polarized beams[17]
图 3 多种不同偏振形态矢量涡旋光在硅晶圆上加工LIPSS的表面形态[21]。(a)径向偏振；(b)角向偏振；(c)螺线偏振；(d)线偏振。插图 (b1)和 (b2)分别放大了 (b)中标注的低频LIPSS边沿区域和靠近中心充满沟道的区域
Figure 3. LIPSS imprinted on Silicon wafer with different vector vortex beams of various polarization state[21]. (a) Radial; (b) Azimuthal; (c) Spiral; (d) Linear. Insets (b1) and (b2) show the zoom-in LSFLs in the peripheral regions and the grooves in the internal region marked in (b)
图 5 超快贝塞尔光场的加工结果。(a)玻璃内的微纳孔道[38]；(b)贝塞尔涡旋光在玻璃内加工的波导[42]；矢量贝塞尔涡旋光加工结果：(c)中空管状波导[43]；(d)矢量贝塞尔涡旋光在蓝宝石表面加工的垂直站立纳米棒[44]
Figure 5. Machining results with ultrafast Bessel beams. (a) Nanochannels in glass[38]; (b) Waveguiding tubes fabricated by Bessel vortex beams[42] ；(c) Vector Bessel vortex beams；[43] (d) Nanorods by vector Bessel vortex beams[44]
图 7 矢量高斯涡旋光产生可控扭转磁化结构[55]。(a)紧聚焦双交叉角向偏振高斯涡旋光产生亚微米磁化结构的示意图；(b)相应光诱导扭转3D磁化体的仿真结果
Figure 7. Twisted magnetization structures induced by vector Gaussian vortex beams [55]. (a) Schematic of magnetization generation at subdiffraction-limited scale; (b) Simulation of the light-induced twisted 3D magnetizations
图 8 不同理论中的贝塞尔涡旋光场焦散。(a) 由任一同心圆上出发的波矢构成的任一双曲面；(b) 理想无衍射场的圆柱型焦散 (红色虚线为Berry的解析结果[60])，箭头为传输方向；(c) 实验产生的贝塞尔涡旋光场 (蓝色虚线为文献[61]的解析焦散)
Figure 8. Caustics of Bessel vortex beams in different theories. (a) Any hyperboloid formed by the rays emitting from a circle in the initial plane; (b) Ideal nondiffracting tubular caustics as deduced in Berry’s work[60] (red dashed line); (c) Expanding tubular caustics (blue lines) in reference [61]
图 10 不同光场在迭加轨道角动量后的焦散或轨迹的对比[63] 。(a)和 (b)类贝塞尔涡旋光；(c)突然自会聚涡旋光。列1、2分别代表在纵剖面内光强分布的仿真、实验结果；列3展示了迭加轨道角动量前后的全局焦散差异
Figure 10. Comparison of different light fields with and without vortices [63]. (a) and (b) Bessel-like beams; (c) Abruptly autofocusing vortex beams. Column 1 and 2 represent, respectively, the intensity profiles along propagation in simulations and in the experiments; Column 3 illustrates the differences between the global caustics of the abruptly autofocusing vortex beams with and without the OAM
图 12 涡旋光双光子聚合加工实现的微管结构。(a)轴向聚焦涡旋光场扫描加工实现的均匀管径微管[67]；(b)由动态全息图辅助轴向扫描聚焦涡旋光方案实现的管径分布可控微管[69]；(c)无扫描贝塞尔涡旋光场单次曝光成型的圆柱微管[70]; (d)突然自会聚涡旋光场单次曝光成型的曲线微碗[71]，侧面贴合的抛物线型焦散曲线由黄色线突出显示
Figure 12. Polymer microtubes fabricated with different vortex beam-based schemes. (a) Uniform tube size enabled by scanning the focused vortex beams[67]; (b) Controllable tube profiles by dynamic hologram-assisted axial scan of the focused vortex beams[69]; (c) Cylindrical micro-tubes fabricated by Bessel vortex beams[70]; (d) Bowl-shaped microstructures fabricated by abruptly autofocusing vortex beams with tailored parabolic caustics highlighted by the yellow rays[71]
图 14 (a)在铌酸锂上利用矢量光阵列加工的多焦点阵列结构[75]；(b)动态矢量多焦点轨迹控制下所加工的周期嵌套结构；(c)多边形与螺旋扇叶结构[76]；(d)汉字“南”和复杂四边形栅格图案[77]
Figure 14. (a) Patterns fabricated on LiNbO3 with vector beam arrays [75]; (b) Dynamically trajectory assisted fabrications of periodic nested microstructures; (c) Polygonal and spiral fan-leaf-like structures [76]; (d) Chinese character “Nan” and irregular quadrilateral grid structures [77]
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[1] Zhan Q. Cylindrical vector beams: from mathematical concepts to applications[J]. Adv Opt Photonics, 2009, 1(1): 1−57. doi: 10.1364/AOP.1.000001
[2] Allen L, Beijersbergen M W, Spreeuw R J C, et al. Orbital angular momentum of light and the transformation of Laguerre-Gaussian laser modes[J]. Phys Rev A, 1992, 45(11): 8185−8189. doi: 10.1103/PhysRevA.45.8185
[3] Forbes A, de Oliveira M, Dennis M R. Structured light[J]. Nat Photonics, 2021, 15(4): 253−262. doi: 10.1038/s41566-021-00780-4
[4] Marrucci L, Manzo C, Paparo D. Pancharatnam-Berry phase optical elements for wave front shaping in the visible domain: Switchable helical mode generation[J]. Appl Phys Lett, 2006, 88(22): 221102. doi: 10.1063/1.2207993
[5] Zhang Y Q, Dou X J, Yang Y, et al. Flexible generation of femtosecond cylindrical vector beams (Invited paper)[J]. Chin Opt Lett, 2017, 15(3): 030007. doi: 10.3788/COL201715.030007
[6] 郑淑君, 林枭, 黄志云, 等. 基于偏光全息的光场调控研究进展[J]. 光电工程, 2022, 49(11): 220114. doi: 10.12086/oee.2022.220114
Zheng S J, Lin X, Huang Z Y, et al. Light field regulation based on polarization holography[J]. Opto-Electron Eng, 2022, 49(11): 220114. doi: 10.12086/oee.2022.220114
[7] 郭迎辉, 蒲明博, 马晓亮, 等. 电磁超构材料色散调控研究进展[J]. 光电工程, 2017, 44(1): 3−22. doi: 10.3969/j.issn.1003-501X.2017.01.001
Guo Y H, Pu M B, Ma X L, et al. Advances of dispersion-engineered metamaterials[J]. Opto-Electron Eng, 2017, 44(1): 3−22. doi: 10.3969/j.issn.1003-501X.2017.01.001
[8] Luo X G. Subwavelength artificial structures: opening a new era for engineering optics[J]. Adv Mater, 2019, 31(4): 1804680. doi: 10.1002/adma.201804680
[9] Pu M B, Guo Y H, Li X, et al. Revisitation of extraordinary young’s interference: from catenary optical fields to spin–orbit interaction in metasurfaces[J]. ACS Photonics, 2018, 5(8): 3198−3204. doi: 10.1021/acsphotonics.8b00437
[10] Wang D Y, Liu F F, Liu T, et al. Efficient generation of complex vectorial optical fields with metasurfaces[J]. Light Sci Appl, 2021, 10(1): 67. doi: 10.1038/s41377-021-00504-x
[11] 柯岚, 章思梦, 李晨霞, 等. 超表面实现复杂矢量涡旋光束的研究进展[J]. 光电工程, 2023, 50(8): 230117. doi: 10.12086/oee.2023.230117
Ke L, Zhang S M, Li C X, et al. Research progress on hybrid vector beam implementation by metasurfaces[J]. Opto-Electron Eng, 2023, 50(8): 230117. doi: 10.12086/oee.2023.230117
[12] 付时尧, 高春清. 矢量涡旋光束的生成与模式识别方法[J]. 光学学报, 2023, 43(15): 1526001. doi: 10.3788/AOS230651
Fu S Y, Gao C Q. Generation and mode recognition method of vectorial vortex beams[J]. Acta Opt Sin, 2023, 43(15): 1526001. doi: 10.3788/AOS230651
[13] Brown T G, Zhan Q W. Focus issue: unconventional polarization states of light[J]. Opt Express, 2010, 18(10): 10775−10776. doi: 10.1364/OE.18.010775
[14] Luo X G, Ishihara T. Surface plasmon resonant interference nanolithography technique[J]. Appl Phys Lett, 2004, 84(23): 4780−4782. doi: 10.1063/1.1760221
[15] Gao P, Yao N, Wang C T, et al. Enhancing aspect profile of half-pitch 32 nm and 22 nm lithography with plasmonic cavity lens[J]. Appl Phys Lett, 2015, 106(9): 093110. doi: 10.1063/1.4914000
[16] Hnatovsky C, Shvedov V G, Krolikowski W, et al. Materials processing with a tightly focused femtosecond laser vortex pulse[J]. Opt Lett, 2010, 35(20): 3417−3419. doi: 10.1364/OL.35.003417
[17] Hnatovsky C, Shvedov V, Krolikowski W, et al. Revealing local field structure of focused ultrashort pulses[J]. Phys Rev Lett, 2011, 106(12): 123901. doi: 10.1103/PhysRevLett.106.123901
[18] Shen W C, Cheng C W, Yang M C, et al. Fabrication of novel structures on silicon with femtosecond laser pulses[J]. J Laser Micro/Nanoeng, 2010, 5(3): 229−232. doi: 10.2961/jlmn.2010.03.0009
[19] Hnatovsky C, Shvedov V G, Shostka N, et al. Polarization-dependent ablation of silicon using tightly focused femtosecond laser vortex pulses[J]. Opt Lett, 2012, 37(2): 226−228. doi: 10.1364/OL.37.000226
[20] Lou K, Qian S X, Wang X L, et al. Two-dimensional microstructures induced by femtosecond vector light fields on silicon[J]. Opt Express, 2012, 20(1): 120−127 doi: 10.1364/OE.20.000120
[21] Nivas J J J, He S T, Rubano A, et al. Direct femtosecond laser surface structuring with optical vortex beams generated by a q-plate[J]. Sci Rep, 2015, 5(1): 17929. doi: 10.1038/srep17929
[22] Cheng H C, Li P, Liu S, et al. Vortex-controlled morphology conversion of microstructures on silicon induced by femtosecond vector vortex beams[J]. Appl Phys Lett, 2017, 111(14): 141901 doi: 10.1063/1.4994926
[23] Allegre O J, Li Z Q, Li L. Tailored laser vector fields for high-precision micro-manufacturing[J]. CIRP Ann, 2019, 68(1): 193−196. doi: 10.1016/j.cirp.2019.04.125
[24] Allegre O J, Perrie W, Edwardson S P, et al. Laser microprocessing of steel with radially and azimuthally polarized femtosecond vortex pulses[J]. J Opt, 2012, 14(8): 085601 doi: 10.1088/2040-8978/14/8/085601
[25] Allegre O J, Jin Y, Perrie W, et al. Complete wavefront and polarization control for ultrashort-pulse laser microprocessing[J]. Opt Express, 2013, 21(18): 21198−21207. doi: 10.1364/OE.21.021198
[26] Jin Y, Allegre O J, Perrie W, et al. Dynamic modulation of spatially structured polarization fields for real-time control of ultrafast laser-material interactions[J]. Opt Express, 2013, 21(21): 25333−25343. doi: 10.1364/OE.21.025333
[27] Ouyang J, Perrie W, Allegre O J, et al. Tailored optical vector fields for ultrashort-pulse laser induced complex surface plasmon structuring[J]. Opt Express, 2015, 23(10): 12562−12572 doi: 10.1364/OE.23.012562
[28] Ghosal A, Allegre O J, Liu Z, et al. Surface engineering with structured femtosecond laser vector fields[J]. Results Opt, 2021, 5: 100179 doi: 10.1016/j.rio.2021.100179
[29] Lou K, Qian S X, Ren Z C, et al. Self-formed two-dimensional near-wavelength microstructures on copper induced by multipulse femtosecond vector optical fields[J]. J Opt Soc Am B, 2012, 29(9): 2282−2287 doi: 10.1364/JOSAB.29.002282
[30] Skoulas E, Manousaki A, Fotakis C, et al. Biomimetic surface structuring using cylindrical vector femtosecond laser beams[J]. Sci Rep, 2017, 7(1): 45114. doi: 10.1038/srep45114
[31] Kawaguchi H, Yasuhara R, Yang H T, et al. Femtosecond vector vortex laser ablation in tungsten: chiral nano-micro texturing and structuring[J]. Opt Mater Express, 2024, 14(2): 424−434. doi: 10.1364/OME.510141
[32] Omatsu T, Chujo K, Miyamoto K, et al. Metal microneedle fabrication using twisted light with spin[J]. Opt Express, 2010, 18(17): 17967−17973 doi: 10.1364/OE.18.017967
[33] Toyoda K, Miyamoto K, Aoki N, et al. Using optical vortex to control the chirality of twisted metal nanostructures[J]. Nano Lett, 2012, 12(7): 3645−3649 doi: 10.1021/nl301347j
[34] Toyoda K, Takahashi F, Takizawa S, et al. Transfer of light helicity to nanostructures[J]. Phys Rev Lett, 2013, 110(14): 143603 doi: 10.1103/PhysRevLett.110.143603
[35] Rahimian M G, Jain A, Larocque H, et al. Spatially controlled nano-structuring of silicon with femtosecond vortex pulses[J]. Sci Rep, 2020, 10(1): 12643 doi: 10.1038/s41598-020-69390-4
[36] Ahmed M A, Voß A, Vogel M M, et al. Radially polarized high-power lasers[J]. Proc SPIE, 2009, 7131: 71311I doi: 10.1117/12.816818
[37] Kraus M, Ahmed M A, Michalowski A, et al. Microdrilling in steel using ultrashort pulsed laser beams with radial and azimuthal polarization[J]. Opt Express, 2010, 18(21): 22305−22313. doi: 10.1364/OE.18.022305
[38] Bhuyan M K, Courvoisier F, Lacourt P A, et al. High aspect ratio nanochannel machining using single shot femtosecond Bessel beams[J]. Appl Phys Lett, 2010, 97(8): 081102. doi: 10.1063/1.3479419
[39] Bhuyan M K, Velpula P K, Colombier J P, et al. Single-shot high aspect ratio bulk nanostructuring of fused silica using chirp-controlled ultrafast laser Bessel beams[J]. Appl Phys Lett, 2014, 104(2): 021107. doi: 10.1063/1.4861899
[40] Rapp L, Meyer R, Giust R, et al. High aspect ratio micro-explosions in the bulk of sapphire generated by femtosecond Bessel beams[J]. Sci Rep, 2016, 6(1): 34286. doi: 10.1038/srep34286
[41] He F, Yu J J, Tan Y X, et al. Tailoring femtosecond 1.5-μm Bessel beams for manufacturing high-aspect-ratio through-silicon vias[J]. Sci Rep, 2017, 7(1): 40785. doi: 10.1038/srep40785
[42] Xie C, Jukna V, Milián C, et al. Tubular filamentation for laser material processing[J]. Sci Rep, 2015, 5(1): 8914. doi: 10.1038/srep08914
[43] Baltrukonis J, Ulčinas O, Orlov S, et al. High-order vector Bessel-gauss beams for laser micromachining of transparent materials[J]. Phys Rev Appl, 2021, 16(3): 034001. doi: 10.1103/PhysRevApplied.16.034001
[44] Belloni V V, Hassan M, Furfaro L, et al. Single shot generation of high-aspect-ratio nano-rods from sapphire by ultrafast first order Bessel beam[J]. Laser Photonics Rev, 2024, 18(3): 2300687 doi: 10.1002/lpor.202300687
[45] Mishchik K, Beuton R, Caulier O D, et al. Improved laser glass cutting by spatio-temporal control of energy deposition using bursts of femtosecond pulses[J]. Opt Express, 2017, 25(26): 33271−33282 doi: 10.1364/OE.25.033271
[46] Cheng G, Rudenko A, D'Amico C, et al. Embedded nanogratings in bulk fused silica under non-diffractive Bessel ultrafast laser irradiation[J]. Appl Phys Lett, 2017, 110(26): 261901 doi: 10.1063/1.4987139
[47] Zhang G, Cheng G, Bhuyan M, et al. Efficient point-by-point Bragg gratings fabricated in embedded laser-written silica waveguides using ultrafast Bessel beams[J]. Opt Lett, 2018, 43(9): 2161−2164 doi: 10.1364/OL.43.002161
[48] Lu J F, Hassan M, Courvoisier F, et al. 3D structured Bessel beam polarization and its application to imprint chiral optical properties in silica[J]. APL Photonics, 2023, 8(6): 060801. doi: 10.1063/5.0140843
[49] Zhao M, Wen J, Hu Q, et al. A 3D nanoscale optical disk memory with petabit capacity[J]. Nature, 2024, 626(8000): 772−778 doi: 10.1038/s41586-023-06980-y
[50] Zhang Y J, Bai J P. Improving the recording ability of a near-field optical storage system by higher-order radially polarized beams[J]. Opt Express, 2009, 17(5): 3698−3706. doi: 10.1364/OE.17.003698
[51] Jiang Y S, Li X P, Gu M. Generation of sub-diffraction-limited pure longitudinal magnetization by the inverse Faraday effect by tightly focusing an azimuthally polarized vortex beam[J]. Opt Lett, 2013, 38(16): 2957−2960. doi: 10.1364/OL.38.002957
[52] Wang S C, Li X P, Zhou J Y, et al. Ultralong pure longitudinal magnetization needle induced by annular vortex binary optics[J]. Opt Lett, 2014, 39(17): 5022−5025 doi: 10.1364/OL.39.005022
[53] Yan W C, Nie Z Q, Zhang X R, et al. Magnetization shaping generated by tight focusing of azimuthally polarized vortex multi-Gaussian beam[J]. Appl Opt, 2017, 56(7): 1940−1946 doi: 10.1364/AO.56.001940
[54] Nie Z Q, Ning Z B, Liu X F, et al. Creating multiple ultra-long longitudinal magnetization textures by strongly focusing azimuthally polarized circular Airy vortex beams[J]. Opt Express, 2023, 31(12): 19089−19101 doi: 10.1364/OE.490250
[55] Liu X F, Yan W C, Liang Y, et al. Twisting polarization-tunable subdiffraction-limited magnetization through vectorial beam coupling[J]. Adv Photonics Res, 2022, 3(1): 2100117 doi: 10.1002/adpr.202100117
[56] Zijlstra P, Chon J W M, Gu M. Five-dimensional optical recording mediated by surface plasmons in gold nanorods[J]. Nature, 2009, 459(7245): 410−413. doi: 10.1038/nature08053
[57] Gu M, Li X P, Cao Y Y. Optical storage arrays: a perspective for future big data storage[J]. Light Sci Appl, 2014, 3(5): e177. doi: 10.1038/lsa.2014.58
[58] Li X P, Lan T H, Tien C H, et al. Three-dimensional orientation-unlimited polarization encryption by a single optically configured vectorial beam[J]. Nat Commun, 2012, 3(1): 998 doi: 10.1038/ncomms2006
[59] Xian M C, Xu Y, Ouyang X, et al. Segmented cylindrical vector beams for massively-encoded optical data storage[J]. Sci Bull, 2020, 65(24): 2072−2079 doi: 10.1016/j.scib.2020.07.016
[60] Berry M V, McDonald K T. Exact and geometrical optics energy trajectories in twisted beams[J]. J Opt A: Pure Appl Opt, 2008, 10(3): 035005. doi: 10.1088/1464-4258/10/3/035005
[61] Xie C, Giust R, Jukna V, et al. Light trajectory in Bessel-Gauss vortex beams[J]. J Opt Soc Am A, 2015, 32(7): 1313−1316. doi: 10.1364/JOSAA.32.001313
[62] Xiao N, Xie C, Jia E S, et al. Caustic interpretation of the abruptly autofocusing vortex beams[J]. Opt Express, 2021, 29(13): 19975−19984. doi: 10.1364/OE.430497
[63] Xiao N, Xie C, Courvoisier F, et al. Caustics of the axially symmetric vortex beams: analysis and engineering[J]. Opt Express, 2022, 30(16): 29507−29517. doi: 10.1364/OE.465169
[64] Mills B, Kundys D, Farsari M, et al. Single-pulse multiphoton fabrication of high aspect ratio structures with sub-micron features using vortex beams[J]. Appl Phys A, 2012, 108(3): 651−655 doi: 10.1007/s00339-012-6945-z
[65] Stankevicius E, Gertus T, Rutkauskas M, et al. Fabrication of micro-tube arrays in photopolymer SZ2080 by using three different methods of a direct laser polymerization technique[J]. J Micromech Microeng, 2012, 22(6): 065022 doi: 10.1088/0960-1317/22/6/065022
[66] Yang L, El-Tamer A, Hinze U, et al. Two-photon polymerization of cylinder microstructures by femtosecond Bessel beams[J]. Appl Phys Lett, 2014, 105(4): 041110 doi: 10.1063/1.4891841
[67] Yang L, Qian D D, Xin C, et al. Direct laser writing of complex microtubes using femtosecond vortex beams[J]. Appl Phys Lett, 2017, 110(22): 221103 doi: 10.1063/1.4984744
[68] Yang L, Qian D D, Xin C, et al. Two-photon polymerization of microstructures by a non-diffraction multifoci pattern generated from a superposed Bessel beam[J]. Opt Lett, 2017, 42(4): 743−746 doi: 10.1364/OL.42.000743
[69] Ji S Y, Yang L, Zhang C C, et al. High-aspect-ratio microtubes with variable diameter and uniform wall thickness by compressing Bessel hologram phase depth[J]. Opt Lett, 2018, 43(15): 3514−3517 doi: 10.1364/OL.43.003514
[70] Jia E S, Xie C, Xiao N, et al. Two-photon polymerization of femtosecond high-order Bessel beams with aberration correction[J]. Chin Opt Lett, 2023, 21(7): 071203. doi: 10.3788/COL202321.071203
[71] Jia E S, Xie C, Yang Y, et al. Abruptly autofocusing vortex beams for rapid controllable femtosecond two-photon polymerization[J]. Materials, 2023, 16(13): 4625. doi: 10.3390/ma16134625
[72] Liu S, Qi S X, Zhang Y, et al. Highly efficient generation of arbitrary vector beams with tunable polarization, phase, and amplitude[J]. Photonics Res, 2018, 6(4): 228−233. doi: 10.1364/PRJ.6.000228
[73] Pan Y, Gao X Z, Zhang G L, et al. Spin angular momentum density and transverse energy flow of tightly focused kaleidoscope-structured vector optical fields[J]. APL Photonics, 2019, 4(9): 096102. doi: 10.1063/1.5117269
[74] Lou K, Qian S X, Ren Z C, et al. Femtosecond laser processing by using patterned vector optical fields[J]. Sci Rep, 2013, 3(1): 2281. doi: 10.1038/srep02281
[75] Cai M Q, Tu C H, Zhang H H, et al. Subwavelength multiple focal spots produced by tight focusing the patterned vector optical fields[J]. Opt Express, 2013, 21(25): 31469−31482. doi: 10.1364/OE.21.031469
[76] Cai M Q, Li P P, Feng D, et al. Microstructures fabricated by dynamically controlled femtosecond patterned vector optical fields[J]. Opt Lett, 2016, 41(7): 1474−1477. doi: 10.1364/OL.41.001474
[77] Cai M Q, Wang Q, Tu C H, et al. Dynamically taming focal fields of femtosecond lasers for fabricating microstructures[J]. Chin Opt Lett, 2022, 20(1): 010502 doi: 10.3788/COL202220.010502
[78] Zheng J, Huang J X, Xu S L. Multiscale micro-/nanostructures on single crystalline SiC fabricated by hybridly polarized femtosecond laser[J]. Opt Lasers Eng, 2020, 127: 105940. doi: 10.1016/j.optlaseng.2019.105940
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