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摘要
具备大长宽比、高轻量化率特征的平面反射镜是大型离轴三反相机光机结构的研制难点，针对某通光口径为1220 mm×198 mm的平面反射镜，提出一种使用半封闭式碳化硅镜体并配合背部三点支撑形式的组件方案，质量仅为30.5 kg。通过优化支撑点位置，改善镜体支撑效果。调整柔性支撑中铰链的尺寸和位置，兼顾组件的自重变形、热稳定性及动力学特性。仿真分析结果表明，平面反射镜在检测重力工况中的面形精度变化均方根(RMS)为1.812 nm、倾角为3.639″。实测组件基础频率为132.5 Hz，经抛光后，测得平面反射镜左、中、右各子区域的面形精度RMS值分别为0.0203λ、0.0197λ、0.0204λ (λ=632.8 nm)，且在环境试验前后保持稳定，可满足高性能空间相机的使用需求。
Abstract
The flat mirror with the characteristics of large aspect ratio and high lightweight rate is one difficulty in the opto-mechanical design of a large off-axis three-mirror anastigmat cameras. For a certain flat mirror with a clear aperture of 1220 mm×198 mm, the assembly structure combining a semi-closed mirror blank made of silicon carbide with the three-point back support scheme was proposed, resulting in a total design weight of 30.5 kg. The supporting effect of the mirror was improved through the optimization of support positions. Both the size and position of hinges in the flexure were adjusted, taking into account gravitational deformation, thermal stability, and dynamic characteristics of the assembly. Simulation reveals that, under the condition of gravity during the test, the root mean square (RMS) of the surface accuracy change of the flat mirror is 1.812 nm, together with the tilt of 3.639" for the mirror blank. The measured fundamental frequency of the assembly is 132.5 Hz. After polishing, the tested RMS values of surface accuracy are 0.0203λ, 0.0197λ, and 0.0204λ (λ=632.8 nm), corresponding to the left, middle, and right sub-zones of the flat mirror respectively. The surface accuracy can remain basically unchanged after environmental tests, which meets the requirements of high-performance space cameras.
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图 4 背部三点支撑位置对镜体自重变形的影响。(a) δy=50 mm；(b) δy=80 mm；(c) δy=110 mm
Figure 4. Influence of three-point back support position on gravitational deformation of mirror. (a) δy=50 mm; (b) δy=80 mm; (c) δy=110 mm
图 5 典型支撑位置下的平面镜自重变形。(a) Dx=610 mm；(b) Dx=650 mm；(c) Dx=690 mm
Figure 5. Gravitational deformation of flat mirror under typical support positions. (a) Dx=610 mm; (b) Dx=650 mm; (c) Dx=690 mm
图 6 平面镜背部三点支撑结构。(a)装配关系；(b)组件实物
Figure 6. Back three-point support structure for flat mirror. (a) Assembly relationship; (b) Component physical object
图 7 双轴正交铰链式柔性支撑。(a)主要柔性参数；(b)铰链结构参数优化；(c)铰链位置与镜体变形的关系
Figure 7. Flexure support with biaxial orthogonal hinge. (a) Main flexure parameters; (b) Optimization of hinge structure parameters; (c) Relation between hinge position and mirror deformation
图 8 典型工况下镜面变形拟合云图。(a) 1 G, -Y向重力；(b) 4 ℃温度变化；(c) 0.02 mm不平度；(d)复合工况
Figure 8. Fitting nephograms of mirror deformation under typical conditions. (a) 1 G, -Y gravity; (b) 4 ℃ temperature change; (c) 0.02 mm forced displacement; (d) Compound
图 10 平面镜面形精度检测。(a) 反射面分区示意图；(b) 大口径干涉仪检测现场
Figure 10. Surface accuracy test of flat mirror. (a) Schematic of surface zoning; (b) Test scene using large aperture interferometer
图 11 平面镜分区面形云图。(a) 左侧，RMS为0.0203λ；(b) 中部，RMS为0.0197λ；(c) 右侧，RMS为0.0204λ
Figure 11. Zonal surface nephograms of flat mirror. (a) Left, RMS of 0.0203λ; (b) Middle, RMS of 0.0197λ; (c) Right, RMS of 0.0204λ
表 1 平面镜组件主要设计指标
Table 1. Main design metrics for flat mirror assembly
No. Item Requirement 1 Clear aperture 1220 mm×198 mm 2 Testing attitude Optical axis horizontal 3 Gravitational deformation Tilt: θM≤10″ 4 Working temperature (20±4) ℃ 5 Surface accuracy RMS≤1/50λ over sub-aperture of φ140 mm (λ=632.8 nm) 6 Mass ≤40 kg 7 Frequency ≥100 Hz 
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表 2 主要可见光波段空间反射镜材料属性
Table 2. Properties of spatial reflector materials in main visible light band
Property SiC ULE Zerodur Density ρ/(kg·m−3) 3050 2210 2530 Elastic modulus E/Gpa 340 67 91 Specific stiffness E/ρ 111.5 30.3 36 Thermal conductivity λ1/(W·K−1·m−1) 155 1.31 1.64 Thermal expansion coefficient α/(10−6·K−1) 2.50 0.03 0.05 Thermal stability λ1/α 62 43.7 32.8
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表 3 主要零件材料及其物理属性
Table 3. Main parts materials and their physical properties
Parameter Main parts material Mirror Cone Flexure Base Material SiC Invar TC4 SiC/Al Density ρ/(kg·m−3) 3050 8100 4400 3000 Elastic modulus E/Gpa 340 141 114 180 Poisson ratio μ 0.27 0.25 0.34 0.18 Thermal expansion coefficient α/(10−6·K−1) 2.5 2.5 9.1 8.4
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表 4 典型工况下平面镜组件变形数据
Table 4. Deformation data of the flat mirror assembly under typical conditions
Typical condition RMS/nm θX/″ Condition 1 Gravity/(1 G, −Y) 1.812 3.639 Condition 2 Temperature change/4 ${}^ \circ {\mathrm{C}} $ 3.302 / Condition 3 Forced displacement/0.02 mm 0.948 / Condition 1+2+3 Compound 5.044 / Requirement ≤1/50λ (λ=632.8 nm) ≤10″
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表 5 平面镜组件模态分析结果
Table 5. Modal analysis results of flat mirror assembly
No. Frequency/Hz Vibration mode 1 129.1 Mirror rotation around Y-axis 2 134.6 Mirror rotation around X-axis 3 174.9 Mirror rotation around Z-axis 4 178.5 Mirror translation along Y-axis 5 193.3 Mirror translation along X-axis 6 201.5 Mirror translation along Z-axis
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表 6 翻转前后平面镜面形精度数据
Table 6. Surface accuracy data of flat mirror before and after overturn
Zone RMS/λ Left Before 0.0203 After 0.0213 Middle Before 0.0197 After 0.0204 Right Before 0.0204 After 0.0207
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