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激光直写制备金属与碳材料微纳结构与器件研究进展

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文章导航 > 光电工程 > 2022 Vol. 49 > No. 1 > 210330

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周伟平，白石，谢祖武，等. 激光直写制备金属与碳材料微纳结构与器件研究进展[J]. 光电工程，2022，49(1): 210330. doi: 10.12086/oee.2022.210330
引用本文: 周伟平，白石，谢祖武，等. 激光直写制备金属与碳材料微纳结构与器件研究进展[J]. 光电工程，2022，49(1): 210330. doi: 10.12086/oee.2022.210330
shu
Zhou W P, Bai S, Xie Z W, et al. Research progress of laser direct writing fabrication of metal and carbon micro/nano structures and devices[J]. Opto-Electron Eng, 2022, 49(1): 210330. doi: 10.12086/oee.2022.210330
Citation: Zhou W P, Bai S, Xie Z W, et al. Research progress of laser direct writing fabrication of metal and carbon micro/nano structures and devices[J]. Opto-Electron Eng, 2022, 49(1): 210330. doi: 10.12086/oee.2022.210330
shu

激光直写制备金属与碳材料微纳结构与器件研究进展

    • 1.

      湖南科技大学物理与电子科学学院，智能传感器与新型传感材料湖南省重点实验室，湖南 湘潭 411201

    • 2.

      理化学研究所光量子工学研究中心先进激光加工研究团队，埼玉县351-0198，日本

    • 3.

      先进制造与纳米工程实验室，紫罗兰街，滑铁卢市，安大略省N2V 2V6，加拿大

  • 基金项目:
    湖南省教育厅一般项目(19C0763)；湖南科技大学博士启动基金资助项目(E52060)
详细信息
    作者简介:
  • 【通信作者】周伟平(1987-)，男，博士，助理研究员，激光微纳加工。E-mail: joweiping@hnust.edu.cn;
  • 白石，男，博士，激光微纳加工与制造。E-mail: shi.bai@riken.jp;
  • 谢祖武，男，学士，主要从事激光直写相关研究。E-mail: 1195968435@qq.com;
  • 刘明伟，男，博士，教授，主要从事激光物理与量子精密测量研究和课程教学研究。E-mail: mwliu@hnust.edu.cn;
  • 胡安明，男，博士，教授，从事超快激光微纳加工及相关领域工作，对于纳米材料的光还原合成与应用，超快激光纳米连接已经开展了深层次的研究，并在国际上首次提出了采用飞秒激光非热熔化机制进行纳米材料的连接，证实了其可行性。E-mail: a2hu@uwaterloo.ca
    • *通讯作者: 周伟平， joweiping@hnust.edu.cn

  • 中图分类号: TN249

Research progress of laser direct writing fabrication of metal and carbon micro/nano structures and devices

    • 1.

      Key Laboratory of Intelligent Sensors and Advanced Sensing Materials of Hunan Province, School of Physics and Electronic Science, Hunan University of Science and Technology, Xiangtan, Hunan 411201, China

    • 2.

      Advanced Laser Processing Research Team, RIKEN Center for Advanced Photonics, 2-1 Hirosawa, Wako, Saitama 351-0198, Japan

    • 3.

      Advanced Manufacturing & NanoEngineering Lab, 578 Violet Street, Waterloo, ON N2V 2V6, Canada

  • Fund Project: Scientific Research Fund of Hunan Provincial Education Department, China (19C0763) and PhD Research Startup Foundation of Hunan University of Science and Technology (E52060)
More Information

    摘要

  • 激光直写技术作为一种新兴的低成本、高效、高精度的加工技术，可以适用于几乎任意自由度的二维或者三维微纳结构快速成型制备。这对光电子以及半导体微纳结构与器件的制备具有重大的意义。金属微纳结构在电子学和光子学中有着广泛的应用。本文综述了激光直写制备金属微纳结构相关研究进展。主要包括激光直写制备金、银、铜以及复合材料微纳结构与器件。随后重点综述了激光直写表面增强拉曼光谱微流道芯片相关的研究进展。随着环保要求的不断提高，功能性碳材料将会在更多领域得到广泛的应用。与传统的热碳化方法相比，激光直写工艺可以在材料的表面上实现精细的图案化微纳结构的制备。本文进一步综述了激光碳化直写碳功能材料相关研究进展。主要包括激光直写原位还原氧化石墨烯、激光碳化木材、叶子等木质材料。通过对本课题组的研究以及目前相关的研究成果进行综述，本文可为激光直写制备金属与碳材料微纳结构与器件研究及应用提供参考。

    As a low-cost, high-efficiency, and high-precision processing technology, laser direct writing can be applied to rapidly prototype two-dimensional or three-dimensional micro/nano-structures with almost arbitrary degrees of freedoms. This is of great significance to the fabrication of optoelectronics and semiconductor micro-nano structures and devices. Metal micro/nano-structures have a wide range of applications in electronics and photonics. This article reviews the research progress of laser direct writing of metal micro/nano-structures, including the preparation of micro/nano-structures and devices using gold, silver, copper and their composite materials. Subsequently, the research progress of laser direct writing on surface-enhanced Raman spectroscopy microfluidic chip is reviewed. With increase of requirements for environmental protection, functional carbon materials are extensively used in many fields. Compared with the traditional thermal carbonization method, the laser direct writing process can realize the fabrication of fine patterned micro/nano-structures on the surface. This article reviews the research progress of laser in-situ reduction of graphene oxide, laser carbonized wood, leaves and other wood materials. By reviewing the research of our research group and other related research results, this article can provide reference for the research and application of laser direct writing of metal and carbon material for micro/nano-structures and devices.

    • Overview

  • Overview: As a low-cost, high-efficiency, and high-precision processing technology, laser direct writing can be applied to rapidly prototype two-dimensional or three-dimensional micro/nano-structures of almost arbitrary degrees of freedoms. This is of great significance to the fabrication of optoelectronics and semiconductor micro/nano-structures and devices. Metal micro/nano-structures have a wide range of applications in electronics and photonics. This article reviews the research on the fabrication of metal micro/nano-structures and device by laser direct writing. Laser direct writing has made progress in the preparation of gold, silver, copper and metal composite based micro/nano-structures and devices. The current research mainly focuses on how to realize the laser direct writing preparation of novel materials and the improvement of performance, such as electrical conductivity. The improvement on laser processing precision mainly relies on the innovation of laser direct writing methods, such as stimulated emission depletion laser direct writing technology. In the preparation of conventional metal micro/nano-structures and devices, laser direct writing technology has shown its unique advantages. Due to the non-contact and high-energy characteristics of laser direct writing, it has significant advantages in the preparation of surface-enhanced Raman scattering (SERS) chips, and is especially suitable for processing materials in cavities or micro-channels inside transparent materials. With the development of flexible electronics and wearable devices, laser direct writing technology has advantages in the preparation of flexible electronic devices due to its ultra-fast processing and low thermal effects. With the improvement of environmental protection requirements, functional carbon materials will be widely used. Compared with the traditional thermal carbonization methods, the laser direct writing process can realize the preparation of fine patterned micro/nano-structures on the surface of material. In addition to graphene oxide or polyamide materials, laser direct writing can directly write patterned graphene on the surface of food, cloth, paper, and even natural coal materials. These studies can further expand the range of material selections for carbon-based functional devices. In short, the laser direct writing technology provides an effective method to prepare low-cost, green and environmentally friendly devices.

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  • 图 1  激光直写加工系统的示意图

    Figure 1.  Schematic diagram of laser direct writing processing system

    下载: 全尺寸图片 幻灯片

    图 2  (a) 单光子，(b) 多光子和(c) 热驱动反应类型示意图[19]

    Figure 2.  Schematic diagram of (a) single photon, (b) multi-photon and (c) thermally driven reaction

    下载: 全尺寸图片 幻灯片

    图 3  (a)激光直写制备银金属微纳结构电极[26]；(b)激光直写制备防水力敏传感器[27]

    Figure 3.  (a) Laser direct writing preparation of silver metal micro-nano structure electrode[26]; (b) Laser direct writing preparation of waterproof force-sensitive sensor [27]

    下载: 全尺寸图片 幻灯片

    图 4  激光直写实验装置示意图。PET衬底上的星形和锯齿形铜电极。用于打开和关闭LED的触摸开关控制装置的照片[28]

    Figure 4.  The schematic diagram of the laser direct writing experimental device. Star and zigzag copper electrodes on PET substrate. Photo of the touch switch control device for turning on and off the LED[28]

    下载: 全尺寸图片 幻灯片

    图 5  在纸基体上制造还原氧化石墨烯和金集流体结构用于微型超级电容器的示意图和照片[33]

    Figure 5.  A schematic diagram and photograph of manufacturing reduced graphene oxide and gold current collector structure on a paper substrate for use in miniature supercapacitors[33]

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    图 6  全飞秒混合激光加工超高灵敏SERS芯片[46]

    Figure 6.  Femtosecond laser processing ultra-sensitive SERS chip[46]

    下载: 全尺寸图片 幻灯片

    图 7  面包表面激光直写碳化制备石墨烯结构[58]

    Figure 7.  Graphene structure prepared by laser direct writing and carbonization of bread surface[58]

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    图 8  激光直写在聚合物表面上制作了六个单元的碳传感器阵列的图像[61]

    Figure 8.  Laser direct writing on the surface of the polymer produced an image of a six-unit carbon sensor array[61]

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    图 9  激光直写碳化MoS2掺杂膜超级电容器的形貌及电学性能测试结果[65]

    Figure 9.  The morphology and electrical performance test results of laser direct writing carbonized MoS2 doped film supercapacitor[65]

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    下载: 全尺寸图片 幻灯片
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收稿日期:  2021-10-17
修回日期:  2022-01-05
刊出日期:  2022-01-25

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