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Research progress and applications of polarization integrated infrared photodetector
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摘要:
偏振集成探测器具有体积小、重量轻、结构紧凑，并且无需图像配准对动态目标同时同地同源探测与识别的优势。本文主要介绍了偏振集成光电探测器单元器件、线列焦平面、面阵焦平面的研究进展，分析了光栅结构设计与仿真、亚微米偏振光栅制备、集成与测试、偏振图像数据重构等获得高消光比偏振集成探测器的关键技术，最后介绍了偏振成像针对无人机、伪装卡车、地雷、海面舰船、面部识别、无人驾驶道路识别、海面漏油检测及医疗检测等方面的典型应用。
Abstract:Polarization integrated detector has the advantages of small size, light weight, compact structure, and no need for image registration to detect and recognize the dynamic targets simultaneously at the same place. This article mainly introduces the research progress and applications of polarization integrated infrared detector. We analyse the key technologies for obtaining high extinction ratio polarization integrated detectors, such as grating structure design and simulation, submicron polarization grating preparation, integration and testing, polarization image data reconstruction, etc. Finally, we introduce the typical applications of polarization imaging in unmanned aerial vehicles, camouflaged trucks, landmines, sea vessels, facial recognition, road recognition, sea oil leakage detection, medical detection, etc.
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Overview: As one of the important platforms of the fourth generation new photoelectric imaging technology, the polarization integrated detector can simultaneously obtain multi-dimensional information such as the intensity and polarization of infrared radiation, and has the advantages of small size and high reliability. It is the development direction of the future infrared polarization imaging system. We first introduce the concept and research progress of the polarization integrated detectors, from the earliest regional polarization integrated detectors to pixel level polarization integrated detectors, and from the linear polarization integrated detectors to the focal planar array polarization integrated detectors. The second part mainly introduces the key technologies of the polarization integrated detector, mainly including the integrated structure design and the influence of related parameters on device performance, the method of the submicron polarization grating structure integration process, and the performance testing system. The third part mainly introduces the pseudo color image reconstruction method of the polarization integrated detector imaging and its application to typical targets in complex scenes. The last part introduces the new progress of the long-wave infrared polarization focal plane of Shanghai Institute of Technical Physics.
Infrared polarization imaging shows great advantages based on the application requirements in some scenarios, but it also faces the huge challenge of reducing the signal-to-noise ratio and the spatial resolution caused by halving the received radiation energy. It needs to make continuous efforts to break through the existing technical bottlenecks in both hardware and software. In terms of the performance of polarization integrated devices, it is necessary to continue to improve the extinction ratio of the polarization integrated detector by cooperating with the metasurface structure to control the light field. In the aspect of image reconstruction and fusion, it is necessary to clarify the polarization characteristics of the target and background and the transmission characteristics of polarization through the polarization coding algorithm, and reflect its important value of significantly improving the signal-to-background ratio in the imaging detection of typical targets in relevant application scenarios.
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图 1 偏振集成探测器成像基本概念及内涵
Figure 1. Basic concept and connotation of polarization integrated detector imaging
图 2 (a)量子阱红外探测器示意图及偏振响应测试光谱[5]；(b) Ⅱ类超晶格中红外结构示意图及偏振响应测试光谱[6]；(c)集成等离子体微腔量子阱红外探测器光场分布图及SEM图[7]；(d)集成非中心对称均匀椭圆阵列非制冷红外传感器结构示意图及SEM图[8]；(e)集成非均匀光子晶体结构的InGaAsP量子阱光电探测器结构示意图及偏振选择增强光谱[9]
Figure 2. (a) Schematic diagram of the quantum well infrared detector and polarization response test spectrum [5]; (b) Schematic diagram of the mid infrared structure of type II superlattice and polarization response spectrum [6]; (c) Optical field distribution diagram and SEM diagram of the integrated plasma microcavity quantum well infrared detector[7]; (d) Structural diagram and SEM diagram of the integrated non centrosymmetric uniform elliptical array uncooled infrared sensor[8]; (e) Schematic diagram and polarization selective enhanced spectrum of the InGaAsP quantum well photodetectors with the integrated non-uniform photonic crystal structure [9]
图 3 (a) 手性材料与半导体集成圆偏振光电探测器示意图[10]；(b) 线偏振、圆偏振光相互转换超表面材料示意图[11]；(c)单片集成表面超材料的中波红外偏振探测器的理论模型[12-14]；(d)圆偏振结构对称性设计；(e) T型结构单元参数设计 ；(f)器件几何化设计包括环形、半环形以及L型等；(g)器件实现高选择性的光电响应[15-16]
Figure 3. (a) Schematic diagram of the circular polarization photodetector integrated with chiral materials and semiconductors [10]; (b) Schematic diagram of the linear polarization and circularly polarized light converting each other into super surface materials [11]; (c) Theoretical model of the MWIR polarization detector with monolithic integrated surface metamaterial [12-14]; (d) Symmetry design of the circular polarization structure; (e) Design of the T-shaped structural unit parameters; (f) The geometric design of the devices includes annular, semi annular, and L-shaped designs; (g) Devices achieve highly selective photoelectric response [15-16]
图 5 (a) HgCdTe长波红外分焦平面偏振集成芯片实物图及结构示意图及偏振消光比测试[20]；(b) 2 k×2 k 、像元中心距为20 μm的 InSb 中波红外偏振集成探测芯片及微区光场分布；(c)金属光栅直接集成的实时分焦平面CCD偏振成像传感器示意图及消光比测试；(d)量子阱甚长波偏振集成探测器结构示意图及消光比测试[30]
Figure 5. (a) Physical diagram and structural schematic diagram of the HgCdTe long wave infrared focal plane polarization integrated chip and the polarization extinction ratio test [20]; (b) 2 k × 2 k InSb medium wave infrared polarization integrated detection chip with a pixel center distance of 20 μm and micro area light field distribution; (c) Schematic diagram and extinction ratio test of the real-time focal plane CCD polarization imaging sensor directly integrated with the metal grating; (d) Structural diagram and extinction ratio test of the quantum well very long wave polarization integrated detector[30]
图 7 偏振光栅设计示意图以及消光比与光栅结构参数(周期、线宽、高度)的关系
Figure 7. Schematic of the polarization grating design and the relationship between the extinction ratio and the grating structural parameters (period, linewidth, height)
图 8 消光比(a)、光吸收(b)与入射角度的关系；(c)消光比与偏振片和光敏元距离的关系；(d)不同距离(5 μm、50 μm、200 μm)光场分布[39]
Figure 8. Relationship between the extinction ratio (a) the light absorption (b) and the incident angle; (c) Extinction ratio and distance between the polarizer and photosensitizer; (d) Different distances (5 μm, 50 μm, 200 μm) light field distribution[39]
图 9 亚微米偏振光栅制备主要流程。(a)剥离法；(b)刻蚀法
Figure 9. The main process of preparing the submicron polarization gratings. (a) Lift-off method; (b) Etching method
图 10 不同偏振角度光栅SEM图。(a) 0°、60°、120°偏振方向光栅；(b) 0°、45°、90°、135°偏振方向光栅；(c)镀制减反膜前后光栅透过率；(d)光栅偏振消光比[39]
Figure 10. SEM images of the gratings with different polarization angles. (a) 0°, 60°, 120° polarization direction grating; (b) 0°, 45°, 90°, 135˚ polarization direction grating; (c) Grating polarization light transmittance without and with antireflection film; (d) Polarization extinction ratio of the grating [39]
图 11 (a)偏振集成探测器测试系统示意图[20]；(b) 512×4×3制冷型InAs/GaSb超晶格长波红外偏振集成焦平面芯片及组件；(c)组件消光比测试[39]
Figure 11. (a) Schematic diagram of the polarization integrated detector testing system[20]; (b) 512 × 4 × 3 InAs/GaSb superlattice long wave infrared polarization integrated focal plane chips and module; (c) Polarization extinction ratio test results of module [39]
图 12 (a)强度成像；(b)偏振度成像；(c)偏振角成像；(d)HSV伪彩色成像；(e)优化算法HSV伪彩色成像；(f)最优算法HSV伪彩色成像[46]
Figure 12. (a) Intensity imaging; (b) Degree of polarization imaging; (c) Angle of polarization imaging; (d) HSV pseudo color imaging; (e) Optimization algorithm HSV pseudo color imaging; (f) Optimal algorithm HSV pseudo color imaging[46]
图 16 水面舰船目标长波红外偏振成像与红外强度成像结果对比
Figure 16. Comparison of the long wave infrared polarization imaging and the infrared intensity imaging for the ship targets
图 17 传统红外热成像和偏振成像面部识别对比
Figure 17. Comparison facial recognition of the traditional infrared thermal imaging and the polarization imaging
图 18 偏振识别网络示意图。偏振导向分支和主分支与道路区域特征模块感知融合，并将其馈送到控制头部中枢进行智能决策
Figure 18. Schematic diagram of the polarization recognition network. Polarization oriented branches and main branches are perceived and fused with the road area feature module, and fed back to the control head center for intelligent decision-making
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