光学元件超精密磨抛加工技术研究与装备开发

彭云峰,何佳宽,黄雪鹏,等. 光学元件超精密磨抛加工技术研究与装备开发[J]. 光电工程,2023,50(4): 220097. doi: 10.12086/oee.2023.220097
引用本文: 彭云峰,何佳宽,黄雪鹏,等. 光学元件超精密磨抛加工技术研究与装备开发[J]. 光电工程,2023,50(4): 220097. doi: 10.12086/oee.2023.220097
Peng Y F, He J K, Huang X P, et al. Ultra-precision grinding and polishing processing technology research and equipment development[J]. Opto-Electron Eng, 2023, 50(4): 220097. doi: 10.12086/oee.2023.220097
Citation: Peng Y F, He J K, Huang X P, et al. Ultra-precision grinding and polishing processing technology research and equipment development[J]. Opto-Electron Eng, 2023, 50(4): 220097. doi: 10.12086/oee.2023.220097

光学元件超精密磨抛加工技术研究与装备开发

  • 基金项目:
    国家自然科学基金资助项目 (51675453);深圳科技计划项目 (JCYJ 20160517103720819)
详细信息
    作者简介:
    *通讯作者: 何佳宽,18850470962@163.com
  • 中图分类号: TH74

Ultra-precision grinding and polishing processing technology research and equipment development

  • Fund Project: National Natural Science Foundation of China (52075463) and Technology Projects of Shenzhen (JCYJ20210324122001003)
More Information
  • 在深入实施“中国制造2025”的契机下,我国的超精密加工领域突破了许多关键瓶颈技术,并取得了众多显著的科研成果,建设了一批高水平超精密加工技术创新平台、人才成长平台和应用示范基地,开创了一条我国超精密产业的自主创新发展之路,解决了该领域一些相对应的技术难关。本文主要介绍了厦门大学精密工程实验室在光学超精密加工技术与装备方面的研究进展,围绕大口径光学非球面元件的磨削与抛光加工,阐述课题组研发的加工工艺、磨削与抛光装备、装备监控与控制软件以及相关单元技术。这些研究成果可为实现高端光学元件的超精密加工提供制造加工技术支持与装备解决方案。

  • Overview: Driven by the rapid development of national optical projects such as laser nuclear fusion and aerospace telescopes, as well as high-end civilian fields such as advanced instruments and optical lenses, the requirements for full-frequency domain processing errors and surfaces of optical components are becoming more and more stringent. At this stage, the optical components generally need to go through rough grinding, fine grinding, polishing and coating, and other processes, and their surface quality mainly depends on the defect removal ability and error control level of the polishing process. Whether the fine grinding process can obtain better surface shape accuracy and low surface/subsurface damage suppression determines the processing efficiency, and the ultra-precision processing manufacturing equipment is the premise of the realization of ultra-precision machining of the optical components. So far, all countries in the world have invested in the research and development of optical ultra-precision grinding and polishing technology, and have developed more relatively mature high-precision grinding and polishing equipment, which can better meet the processing needs of most of the current optical components. For the core equipment and key technologies required for ultra-precision manufacturing, China has long relied on imports. In order to break through the bottleneck restricting the development of ultra-precision technology in China at this stage, under the traction and drive of the national large-scale engineering project, China has made remarkable progress in optical ultra-precision manufacturing equipment and technology. However, for the optical ultra-precision technology and equipment, there is still a certain gap between China and the international advanced level, and it is necessary to continue to strengthen the research. In addition to the high-end grinding and polishing equipment necessary for the ultra-precision machining of optical components, it is also necessary to strengthen the technical level of a series of key supporting units, such as ultra-precision grinding and polishing processing technology, high-end key functional components, intelligent monitoring technology of processing environment, efficient ultra-precision machining tools, processing and inspection path planning and compensation processing strategies, computer-aided manufacturing and testing software, etc. The research, development, and application of these technologies are related to the development of high-end manufacturing in the civilian fields and national defense fields, and are also the focus of the country. This paper mainly focuses on the ultra-precision machining of large-diameter optical aspherical components. Starting from the grinding and polishing process route, this paper introduces the long-term research progress of the Precision Engineering Laboratory of Xiamen University in the field of large-diameter optical aspherical component processing, and introduces in detail the technical and system achievements such as ultra-precision grinding and polishing equipment, robot-assisted grinding and polishing, equipment intelligent monitoring system, processing technology and control software.

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  • 图 1  大口径精密磨床UPG80及机床整体钣金外观[11]

    Figure 1.  The appearance of the large diameter precision grinder UPG80 and the overall sheet metal of the machine[11]

    图 2  大口径非球面元件加工结果[15]。(a) 面形精度(PV=3.38 μm);(b) 亚表面损伤深度(h=3 μm)

    Figure 2.  Processing results of the large aperture aspheric elements[15]. (a) Surface shape accuracy (PV=3.38 μm); (b) Subsurface damage depth (h=3 μm)

    图 3  初始流量Q0对运动精度的影响[17]。(a) 角度运动误差;(b) 位移运动误差;(c) 角度运动误差和位移运动误差的PV值

    Figure 3.  Influence of the initial flow Q0 on the motion accuracy[17]. (a) Angular motion error; (b) Displacement motion error; (c) PV value of angular motion error and displacement motion error

    图 4  磨削机床UPG80的X轴结构[11]

    Figure 4.  Guide rail distribution view along the X axis of the grinding machine UPG80[11]

    图 5  五轴数控气囊式抛光机床[19]。(a) 气囊抛光机模型图;(b) 气囊抛光机床实物图

    Figure 5.  Five-axis CNC bonnet polishing machine[19]. (a) Bonnet polishing machine model diagram; (b) Actual drawing of the bonnet polishing machine

    图 6  气囊抛光原理[20]。(a) 进动运动模型;(b) 气囊“AB”摆结构

    Figure 6.  The principle of bonnet polishing[20]. (a) Precession motion model; (b) Bonnet "AB" pendulum structure

    图 7  基于迷宫的抛光路径生成原理图[20]

    Figure 7.  Maze-based polishing path generation schematic[20]

    图 8  中心区域粗糙度测量结果[20]。(a) 光栅路径;(b) Hilbert路径;(c) 迷宫路径

    Figure 8.  Measurement results of roughness in the central region[20]. (a) Grating path; (b) Hilbert path; (c) Maze paths

    图 9  半柔性气囊结构[20]

    Figure 9.  Semi-flexible bonnet structure[20]

    图 10  修形加工前后面形结果[20]。(a) 修形抛光前面形;(b) 修形抛光后面形

    Figure 10.  The results of shaping and processing front and back[20]. (a) Polishing front shape; (b) Polishing back shape

    图 11  空间球柔性进动抛光实验装置[21]

    Figure 11.  Experimental device for flexible precession polishing of space ball[21]

    图 12  实验结果图[21]。(a) 抛光斑材料去除函数;(b) 工件表面抛光前后粗糙度

    Figure 12.  Diagram of the experimental results[21]. (a) Material removal functions of polishing spots; (b) Surface microscale morphologies of the workpiece before and after

    图 13  基于环境模型的阻抗控制算法框图[22]

    Figure 13.  Block diagram of impedance control algorithm based on environment model[22]

    图 14  机器人补偿力控实验结果曲线[22]。(a) 力控实验结果曲线一;(b) 力控实验结果曲线二

    Figure 14.  Experimental results curve of the robot compensation force control[22]. (a) Curve 1 of the force control experiment results; (b) Curve II of the force control experiment results

    图 15  变化压力与稳定压力下的表面加工质量。(a) 压力10 N;(b) 压力15 N;(c) 压力20 N;(d) 10 N稳定压力下的表面加工质量

    Figure 15.  Surface finishing quality under varying pressure and steady pressure. (a) Pressure 10 N; (b) Pressure 15 N; (c) Pressure 20 N; (d) Surface machining quality at 10 N steady pressure

    图 16  机器人气囊抛光系统[24]

    Figure 16.  Control frame diagram of the robot airbag polishing system[24]

    图 17  机器人末端变形云图[26]。(a) 姿态位置角0°;(b) 姿态位置角90°

    Figure 17.  Deformation cloud of robot end[26]. (a) Attitude position angle 0°; (b) Attitude position angle 90°

    图 18  气囊抑振结构[24]。(a) 抑振工具头模型图;(b) 抑振工具头剖视图

    Figure 18.  Bonnet suppression structure[24]. (a) Model diagram of the vibration suppression tool head; (b) Section view of the vibration suppression tool head

    图 19  普通气囊整面抛光前后对比[24]。(a) 抛光前;(b) 抛光后

    Figure 19.  General bonnet whole surface polishing before and after comparison[24]. (a) Before polishing; (b) After polishing

    图 20  抑振气囊整面抛光前后对比[24]。(a) 抛光前;(b) 抛光后

    Figure 20.  Comparison before and after the whole surface polishing of vibration suppression airbag[24]. (a) Before polishing; (b) After polishing

    图 21  磨削智能监控系统框架[28]

    Figure 21.  Frame of the intelligent grinding monitoring system[28]

    图 22  砂轮磨削性能在线评估[29]。 (a) 声发射波形和频谱; (b) 部分节点各样本低频段能量占比;(c) 主特征表征砂轮磨削性能退化曲线

    Figure 22.  Online evaluation of the grinding performance of grinding wheel[29]. (a) Acoustic emission waveform and spectrum; (b) Proportion of the low-frequency energy in samples of some nodes; (c) Main features represent grinding performance degradation curve of grinding wheel

    图 23  LSTM和BPNN网络模型对比图[30]。(a) LSTM网络模型预测结果;(b) BPNN网络模型预测结果

    Figure 23.  Comparison diagram of LSTM and BPNN network models[30]. (a) Prediction results of LSTM network model; (b) Prediction results of BPNN network model

    图 24  五轴高效气囊抛光控制系统。(a) 控制软件主界面;(b) 平面保形抛光;(c) 非球面修正抛光

    Figure 24.  5 axis high efficiency bonnet polishing control system. (a) Main interface of the control software; (b) Plane conformal polishing; (c) Aspheric correction polishing

    图 25  智能机器人辅助磨抛数字孪生系统框图

    Figure 25.  Block diagram of the intelligent robot assisted grinding and polishing digital twin system

    图 26  人机交互界面

    Figure 26.  Human-computer interaction interface

    表 1  大口径精密磨床UPG80技术指标

    Table 1.  Technical specifications of the large diameter precision grinding machine UPG80

    技术指标参数
    可磨削的最大工件尺寸1300 mm×750 mm×550 mm
    工作台承重1500 kg
    数控系统分辨率0.1 μm
    X/Y/Z轴定位精度≤2 μm/300 mm
    X/Y/Z轴重复定位精度≤1 μm/300 mm
    下载: 导出CSV

    表 2  抛光参数

    Table 2.  Polishing parameters

    垂直抛光(θ=0°)倾斜抛光(θ=20°)
    电机1转速(r/min)500714
    电机2转速/(r/min)500350
    电机3转速/(r/min)500350
    球旋转速度/(r/min)481482
    抛光时间/s200500
    下载: 导出CSV
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收稿日期:  2022-05-25
修回日期:  2022-09-27
录用日期:  2022-10-24
刊出日期:  2023-04-25

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