用于可见光波段切趾成像的宽带消色差超表面滤波器

李柱, 王长涛, 孔维杰, 等. 用于可见光波段切趾成像的宽带消色差超表面滤波器[J]. 光电工程,2021,48(5): 200466. doi: 10.12086/oee.2021.200466
引用本文: 李柱, 王长涛, 孔维杰, 等. 用于可见光波段切趾成像的宽带消色差超表面滤波器[J]. 光电工程,2021,48(5): 200466. doi: 10.12086/oee.2021.200466
Li Z, Wang C T, Kong W J, et al. Broadband achromatic metasurface filter for apodization imaging in the visible[J]. Opto-Electron Eng, 2021, 48(5): 200466. doi: 10.12086/oee.2021.200466
Citation: Li Z, Wang C T, Kong W J, et al. Broadband achromatic metasurface filter for apodization imaging in the visible[J]. Opto-Electron Eng, 2021, 48(5): 200466. doi: 10.12086/oee.2021.200466

用于可见光波段切趾成像的宽带消色差超表面滤波器

  • 基金项目:
    国家自然科学基金资助项目(61905073,61875253,61675207);中国科学院青年创新促进会(2019371)
详细信息
  • † 同等贡献作者

  • 作者简介:
    *通讯作者: 罗先刚(1970-),男,博士,研究员,主要从事数字光学、悬链线光学、微纳光刻、亚波长电磁学、结构功能材料及器件,仿生光子器件及系统等的研究. E-mail: lxg@ioe.ac.cn
  • 中图分类号: TH74;O439

Broadband achromatic metasurface filter for apodization imaging in the visible

  • Fund Project: National Natural Science Foundation of China (61905073, 61875253, 61675207) and Youth Innovation Promotion Association of the Chinese Academy of Sciences (2019371)
More Information
  • 切趾在成像和光通信领域得到了重要的应用。传统的切趾方法基于相位或者振幅调制,存在工作带宽窄或者分辨力低的问题。本文提出了一种宽带消色差的超表面滤波器,可以在不损失空间分辨力的情况下实现切趾成像。通过该滤波器在整个可见光波段完成了几乎无色散的相位调制。仿真结果表明,超表面滤波器的聚焦效率是相位滤波器的两倍;其成像对比度可以提升至高斯滤波器的三倍。通过我们的方法,在400 nm到700 nm的可见光波段内,点扩散函数的旁瓣能被压缩到10-5数量级,同时能够实现衍射极限甚至超衍射的分辨力。

  • Overview: Apodization is an effective way to relieve the influence of sidelobes in the point spread function of an imaging system, and has found many significant applications in imaging and optical communication, such as the coronagraphs in astronomical field and spectral tailoring in silicon integrated Bragg grating devices. Traditional apodization methods are based on the phase or amplitude modulation. By introducing mask with specially designed transmittance or diffractive optical element to the pupil plane of an imaging system, the sidelobes in the diffraction pattern are well suppressed so that weak details can be distinguished. However, these methods suffer from either narrow working bandwidth or reduced spatial resolution. Recently, as one kind of artificially structured materials, the metasurfaces have drawn much attention because they can manipulate light field at the subwavelength scale. Among them, the metasurface based on the geometric phase principle has been applied in achromatic imaging, broadband hologram, orbit angular momentum beam, and so on, which provides a new approach to modulate the electromagnetic field flexibly in a broadband spectrum. Benefiting from the broadband dispersionless phase modulation, the metasurface also brings another access for apodization imaging. In this paper, a metasurface apodization filter is proposed to realize broadband achromatic apodization imaging. With this filter, the nearly dispersionless phase modulation in the entire visible waveband can be achieved. The simulated results indicate that, compared to phase apodization filter, the working bandwidth can be improved from 10 nm to 300 nm with metasurface apodization filter. Moreover, the focusing efficiency of metasurface apodization filter is twice larger than that of the phase apodization filter. The sidelobes in the point spread function can be efficiently suppressed to the scale of 10-5 with our design, which helps to resolving point-objects with large intensity contrast. Additionally, the resolution of diffraction limit or even sub-diffraction can be achieved with increased imaging contrast by using this method compared to traditional Gaussian apodization filter. The metasurface apodization filter offers a promising alternative for apodization imaging and potentially promotes further developments in the field like astronomical observation, spectrum detection, and optical communication.

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  • 图 1  Schematic of the apodization imaging system

    图 2  (a) Schematic of the nanostructure in metasurface; (b) Transmittance and phase shift of nanostructures with different θ at the central wavelength of 550 nm; (c) Transmittance and phase shift of nanostructures with θ=±45° from 400 nm to 700 nm; (d) Schematic of the metasurface apodization filter

    图 3  Broadband PSFs of (a) metasurface apodization filter, (b) phase apodization filter, and (c) diffraction-limited imaging. Scalar bar: 400 μm; (d) Radial normalized logarithmic intensity distributions of (a), (b) and (c); (e) The comparison of M for three imaging methods with different working wavelength in logarithmic form

    图 4  Broadband images with (a) metasurface apodization filer, (b) phase apodization filter, (c) diffraction-limited imaging, and (d) Gaussian apodization filter, Scale bar: 400 μm; (e) Normalized logarithmic intensities of (a), (b), (c), and (d) in x-direction; (f) Normalized intensities of (a), (b), (c), and (d) in y-direction

    图 5  Broadband PSFs of (a) MAF and (b) GAF. Scale bar: 100 μm; (c) Radial logarithmic intensity distributions of (a) and (b); Broadband images of (d) MAF and (e) GAF. Scale bar: 30 μm; (f) Normalized intensity distribution along the labeled dashed line in (d), (e) polarization rotation angle (a) and ellipticity (b) of the weak chiral metasurface

    表 1  Performances of MAFs

    Design r G M ROI S
    MAF1 0.23, 0.2335, 0.316, 0.325, 0.4065, 0.421, 0.4975, 0.518, 0.5885, 0.616, 0.6795, 0.7125, 0.77, 0.807, 0.8595, 0.898, 0.9435, 0.978 1.8 0.00001 15RAIRY 0.1412
    MAF2 0.1785, 0.3505, 0.5235, 0.6835, 0.832, 0.948 0.85 0.005 3.5RAIRY 0.0713
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出版历程
收稿日期:  2020-12-18
修回日期:  2021-03-25
刊出日期:  2021-05-15

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