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Current status of ultra-precision manufacturing of complex curved aluminum reflectors
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摘要
由于复杂曲面铝反射镜所具有的独特优势，其在光学系统中的应用越来越广泛。但是只采用超精密车削加工的光学反射镜精度受到超精密车削加工“误差复映”的限制，只能满足红外系统应用需求，其应用的进一步推广遭遇瓶颈。采用超精密车削、磁流变抛光、计算机控制表面成形(CCOS)的组合加工工艺，并结合复杂光学曲面的计算全息图法(CGH)面形检测技术，可以进一步提升铝反射镜的面形精度，满足可见光系统的应用需求，为复杂曲面铝合金反射镜的推广奠定了制造基础。
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关键词:
- 复杂曲面 /
- 铝反射镜 /
- 超精密车削 /
- 抛光 /
- 计算全息图法(CGH)
Abstract
Due to the unique advantages of complex curved aluminum mirrors, its application in optical systems is becoming more and more widespread. However, the accuracy of optical mirrors that are only processed by ultra-precision turning is limited by the "error reflection" of ultra-precision turning, which can only meet the application requirements of infrared systems, and its further promotion and application have encountered bottlenecks. The combined processing technology of ultra-precision turning, magnetorheological polishing, and computer-controlled surface forming (CCOS), combined with the computational hologram method (CGH) of the complex optical curved surface (CGH) surface shape detection technology, can further improve the surface shape accuracy of the aluminum reflector, to meet the application requirements of visible light systems, and lay the foundation for the promotion and application of complex curved aluminum alloy mirrors.
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Overview
Overview: The use of complex curved aluminum reflectors can simplify the structure of the optical system, facilitate the manufacture of complex curved surfaces, reduce the quality of the system, provide a more flexible system layout, have a higher degree of design freedom, and can be integrated without heat. Advantages such as design, its application in high-performance optical systems is becoming more and more extensive. Adopt ultra-precision turning processing of complex curved aluminum mirror, one-time processing can obtain a nano-level smooth surface, and the processing repeatability is good, the production efficiency is high, suitable for mass production, and the processing cost is low, but the accuracy is subject to the ultra-precision turning processing error. The limitation of "Review" can only meet the application requirements of infrared system. If you want to get a complex curved aluminum mirror that meets higher requirements, after ultra-precision turning, you must use a subsequent polishing process to improve the surface accuracy of the aluminum mirror and improve its surface quality. At present, the more mature processing methods for polishing aluminum mirrors after ultra-precision turning mainly include computer controlled surface forming (CCOS) polishing and magnetorheological polishing (MRF) developed based on the principle of CCOS technology. CCOS polishing of aluminum alloy mirrors uses the positive pressure of the polishing abrasive and relative motion to mechanically remove the oxide layer formed on the surface of the aluminum mirror by the chemical reaction of the polishing liquid, which can improve the surface accuracy while controlling the surface quality. Magnetorheological polishing is an ultra-precision optical processing technology between contact and non-contact based on the principle of CCOS molding. It can perform deterministic processing of complex curved optical elements. It has a stable polishing process, easy to realize computer control, and materials. The removal efficiency is high, the polishing head is not worn, and high-quality optical surfaces can be obtained. The outstanding advantage of MRF polishing compared to CCOS polishing technology is that the removal function is stable and accurate, and it can adapt to changes in local curvature when polishing aspheric curved mirrors with complex curved surfaces. The use of magnetorheological polishing, computer-controlled surface forming and other post-polishing processing techniques, combined with the current computational hologram (CGH) surface shape detection technology with the highest accuracy in detecting complex curved surface shapes, can further improve the surface accuracy of complex curved aluminum reflector, to meet the application requirements of visible light systems, and lay the foundation for the promotion and application of complex curved aluminum alloy mirrors.
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图 6 铝反射镜磁流变抛光机理
Figure 6. Mechanism of magnetorheological polishing for aluminum mirror
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