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Multiline parallel precision coherent length measurement of frequency modulation continuous wave LiDAR
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摘要:
面向航空航天等大型复杂机电系统，长度测量的需求从单独的一维位移测量发展到多目标、灵活便于拓展的多路并行测量。调频连续波激光雷达长度测量技术具备抗干扰、精度高、无合作等优势。本文基于调频连续波激光雷达技术开展多路并行相干精密长度测量方法研究，针对传统长度测量系统存在光纤色散、辅助路光纤漂移导致长度测量精度降低问题，提出一种含有氰化氢气体吸收池的三光路马赫-曾德尔干涉测量系统，在此基础上，基于光开关结构实现精密长度多路并行测量。通过精密导轨长度测量实验结果表明，提出的方法在3.6 m长度范围内标准差不超过25 μm，实现了四路并行长度测量。与商用激光干涉仪测量结果比较，多路测量结果的绝对误差不超过30 μm。
Abstract:For large complex electromechanical systems such as aeronautics and astronautics, the demand for length measurement has also evolved from one-dimensional displacement measurement to multi-objective, flexible and extensible multiline parallel measurement. The frequency-modulated continuous-wave lidar length measurement technology has the advantages of anti-interference, high precision and no cooperation. In this paper, a multiline parallel coherent precision length measurement method based on frequency modulation continuous wave laser lidar is studied. To solve the problem of fiber dispersion and auxiliary fiber drift in the traditional length measurement system, a three-channel Mach-Zehnder interferometry system containing a hydrogen cyanide gas absorption cell is proposed. On this basis, the precision length multiline parallel measurement is realized based on the optical switch structure. The experimental results of precision guide rail length measurement show that the proposed method is less than 25 μm in the length range of 3.6 m. The four-way parallel length measurement is realized. The absolute error of the multi-channel measurement results is not more than 30 μm compared with the measurement results of a commercial laser interferometer.
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Key words:
- frequency modulated continuous wave /
- HCN gas cell /
- optical switch /
- length measurement
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Overview: For large complex electromechanical systems such as aeronautics and astronautics, the demand for length measurement has also evolved from one-dimensional displacement measurement to multi-objective, flexible and extensible multiline parallel measurement. The demand for large-size measurements in various industries, especially the manufacturing industry, is increasing day by day and tends to be diversified.
Frequency-modulated continuous-wave lidar measurement is an absolute ranging method that modulates the frequency of the laser, generates a beat frequency through the local oscillator signal of the frequency-modulated laser and the echo signal reflected from the target being measured, and extracts the interference beat frequency signal to obtain the measured distance. Frequency-modulated continuous-wave lidar combines the advantages of traditional radar and laser interferometry, with its non-contact, large measurement range, high resolution and strong anti-interference ability. It plays a vital role in the fields of large-scale space precision measurement, micro-measurement, and biometrics. Compared with the pulse ranging method, it has higher ranging accuracy; compared with the interferometric laser ranging, it can achieve absolute distance measurement, and the system measurement structure is simple. As a high-precision spatial large-scale absolute distance measurement method, frequency-modulated continuous-wave laser length measurement technology can meet the needs of a new generation of measurement scenarios and has many advantages such as anti-interference, high accuracy, and no cooperation. This paper researches multiline parallel coherent precision length measurement methods based on frequency-modulated continuous-wave lasers. Because of the problems of fiber dispersion and auxiliary fiber drift in the traditional length measurement system, which lead to reduced length measurement accuracy, a three-optical path containing a hydrogen cyanide gas absorption cell is proposed. The Mach-Zehnder interferometry system, on this basis, realizes precision length multiline parallel measurement based on the optical switch structure. The experimental results of precision guide rail length measurement show that the proposed method is less than 25 μm in the length range of 3.6 m. The four-way parallel length measurement is realized. The absolute error of the multi-channel measurement results is not more than 30 μm compared with the measurement results of a commercial laser interferometer.
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图 3 基于HCN吸收池的FMCW测距系统示意图
Figure 3. Schematic diagram of FMCW ranging system based on HCN gas cell
图 8 信号对比图。(a) 重采样和滤波前；(b) 重采样和滤波后
Figure 8. Signal comparison diagram. (a) Before resampling and filtering；(b) After Resampling and filtering
图 9 三种测量方法结果对比图
Figure 9. Comparison chart of the results of three measurement methods
图 10 不同位置处四路测量标准差
Figure 10. The standard deviation of four-way measurement at different positions
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