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摘要:
微结构传感器是具有以微尺度结构作为敏感单元，能将外界物理、化学、生物信号转化为电信号的传感器，已广泛应用于智能机器人、健康监控、虚拟电子等领域。目前，微结构传感器的制造方法主要有激光制造技术、MEMS技术和3D打印技术等。激光制造技术是将高能光子束聚焦到被加工物上，使激光与物质相互作用的一种绿色加工方法，主要包括激光烧蚀、激光直写、激光诱导和激光-倒模复合加工等，具有非接触式加工、无掩膜版、可定制化制造等优势，通过优化激光加工工艺参数，可以实现不同尺寸和形状微结构的高效低成本制造。本文对微结构的类型、功能及制造技术进行了概述，同时对激光制造技术制备的微结构传感器进行了归纳分类，详细分析了生物电传感器、温度传感器以及压力传感器的制造技术及应用，最后对微结构传感器激光制造技术的发展趋势进行了总结与展望。
Abstract:Microstructure sensor is a sensor device with the micro-scale structure as a sensitive unit and can convert external physical, chemical, and biological signals into electrical signals. It has been widely used in intelligent robots, health monitoring, virtual electronics, and other fields. At present, the manufacturing methods of microstructure sensors mainly include laser manufacturing technology, MEMS technology, and 3D printing technology. Laser manufacturing technology is a green processing method that focuses the high-energy laser beam on the object to be processed and makes the laser interact with the material, mainly including laser ablation, laser direct writing, laser induction, and laser-template composite processing. It has the advantages of non-contact processing, no mask, and customizable manufacturing. By optimizing the parameters of the laser manufacturing process, it can realize the efficient and low-cost manufacturing of microstructures with different sizes and shapes. In this paper, the types, function, and manufacturing technology of the microstructures are summarized. At the same time, the microstructure sensors fabricated by laser manufacturing technology are summarized and classified, and the manufacturing technology and application of bioelectric sensors, temperature sensors and pressure sensors are analyzed in detail. Finally, the development trends of the laser manufacturing technology for microstructure sensors are summarized and prospected.
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Key words:
- laser manufacturing /
- microstructure /
- bioelectric sensors /
- temperature sensors /
- pressure sensors
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Overview: Microstructure sensor is a kind of sensor with a 2D or 3D micron-scale structure prepared by advanced manufacturing technology. It is used as a sensitive part to enhance the transmission characteristics of physical, chemical, and biological signals to the environment, and convert the external signals into electrical signals. The microstructure is generally a regular or disordered structure, usually in the shape of microspheres, microcolumns, microcones, microgrooves and micropores. The microstructures with different shapes can realize the functions of puncture, pressure transmission, vibration transmission, drug transmission, bioelectric transmission, heat transmission, sound transmission, gas adsorption, and so on. In recent years, researchers from all over the world have gradually attached great importance to the research on the manufacturing technology of microstructure sensors. At present, researchers have proposed the MEMS manufacturing processes, such as reactive ion etching and chemical vapor deposition, to achieve mass manufacturing of high-precision microstructures on flexible polymer materials and rigid materials. In addition, some researchers have also proposed the manufacturing processes such as template method, self-assembly, nanoimprinting, and soft lithography to realize microstructure manufacturing. However, the above-mentioned manufacturing processes usually cannot prepare microstructure in one step, which has the problems of complex process, high production cost, limited processing materials, and unable to control the microstructure morphology. In contrast, laser manufacturing technology has the advantages of non-contact processing, no mask, customizable manufacturing, etc. By optimizing the parameters of laser process (such as laser power, scanning speed, filling mode and scanning path), it can achieve efficient and low-cost manufacturing of microstructures with different sizes and shapes. Therefore, using laser manufacturing technology to realize microstructure manufacturing and applying it to bioelectricity, temperature, and pressure sensors has become a research hotspot in microstructure sensor manufacturing technology. Laser manufacturing technology mainly includes laser ablation, laser direct writing, laser induction, laser-template processing, etc. Laser ablation is an auxiliary heating process based on the thermochemical and thermophysical effects of a laser beam, which melts the materials to be processed to realize structural forming. Laser direct writing is a manufacturing process that focuses high-energy photon beams on the materials to be processed to produce a photochemical process, and manufacturing the structures through material removal. Laser-induced modification is a manufacturing process to change the physical and chemical properties of the materials to be processed. Laser-template processing is a manufacturing process that uses a laser to produce microstructure molds on silicon, glass, polymer, and other substrates, and then uses soft lithography technology to reverse die the structures on the molds. Based on the interaction between the laser and materials, the induction, removal, and migration of materials to be processed can be realized. By adjusting the laser processing mode and processing parameters, the controlled manufacturing of the 2D or 3D microstructures or the controlled preparation of functional materials for the sensitive units can be realized, breaking through the limitations of efficiency and cost of traditional manufacturing methods for microstructures. In this paper, the types, functions, and manufacturing technologies of microstructures are summarized and classified. The preparation processes of laser manufacturing technology and other advanced manufacturing technologies of microstructures are summarized. The applications of microstructure sensors prepared by laser ablation, laser direct writing, laser induction, and laser-template processing technology in bioelectric sensing, temperature sensing, and pressure sensing are described in detail. Finally, the development trend of the laser manufacturing technology for microstructure sensors is summarized and prospected.
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图 1 面向生物电、压力、温度检测的微结构传感器应用
Figure 1. Application of the microstructure sensor for bioelectricity, pressure and temperature detection
图 4 激光制造的压力传感器。 (a) 传感器照片及微结构超景深图、响应时间测试、语音识别应用[66]； (b) 三种微结构SEM图及传感器性能测试[67]；(c) 二级微结构传感器示意图及SEM图像及灵敏度、脉搏性能测试[71]；(d) 传感器微结构示意图及SEM图像[72]
Figure 4. Laser manufacturing pressure sensor. (a) Image of the sensor and microstructure super-depth maps, response time testing, speech recognition applications[66]; (b) SEM images of three microstructures and performance test of sensors[67]; (c) Schematic diagram of microstructure sensor, SEM image, sensitivity and pulse performance test[71]; (d) Schematic diagram of sensor microstructure and SEM image[72]
图 5 基于激光还原氧化石墨烯的温度传感器。 (a) 传感器实物图和还原氧化石墨烯SEM图以及传感器灵敏度、弯曲测试、迟滞测试、吹气和呼吸性能测试及曲面测试[51]；(b) 激光还原氧化石墨烯传感器实物图[76]； (c) 激光划线加工还原氧化石墨烯[77]；(d) 温度传感器制造流程[78].
Figure 5. Temperature sensor based on the laser reduction of graphene oxide. (a) Image of the sensor, SEM image of the reduced graphene oxide, sensitivity, bending test hysteresis test, blowing and breathing performance test and curved surface test of the sensor[51]; (b) Laser reduced graphene oxide sensor diagram[76]; (c) Reduction of graphene oxide by laser[77]; (d) Sensor manfacturing process[78]
图 6 基于激光诱导石墨烯的温度传感器。 (a) NMP钝化BP纳米片典型层状形态的TEM图像和传感器颈静脉测量的照片[81]；(b) 多孔石墨烯电极上ZIS纳米片横截面图的照片和SEM图像[82]；(c) 3×3传感器照片和温度监测响应曲线[83]；(d) 树叶表面诱导石墨烯图案化用于温度传感器[84]
Figure 6. Temperature sensor based on the laser-induced graphene. (a) TEM image of the typical layered morphology of NMP-passivated BP nanosheet and Photograph illustrating location of sensor for jugular vein pulse measurement[81]; (b) Device photograph and SEM images of cross-sectional view of the ZIS nanosheets on porous graphene electrodes[82]; (c) Photograph of the 3 × 3 sensor and response curves for temperature monitoring[83]; (d) Leaf surface induced graphene patterning for temperature sensors[84]
图 7 微针阵列生物电传感器。 (a) 传感器上的微针阵列的SEM图像和顶部光学图像[87]；(b) Au沉积前PDMS微针的扫描电子显微镜图像[88]；(c) 干电极制造流程及微针阵列SEM图像[36, 89]；(d) 电极光学图像[91]；(e) 电极照片和微针阵列SEM图像[92]
Figure 7. Microneedle Array Bioelectric Sensors. (a) SEM image of an array of microneedles on the sensor and top views of the microneedle sensor equipped with an adhesive film[87]; (b) Scanning electron microscope image of the PDMS microneedle before Au deposition[88]; (c) Dry electrode manufacturing process and SEM image of microneedle array[36, 89]; (d) Electrode optical image[91]; (e) Photograph of the sensor and SEM image of the microneedle[92]
表 2 激光制造温度传感器性能对比
Table 2. Performance comparison of laser-manufactured temperature sensors
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