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摘要:
对实时彩色三维动态显示的追求激发了学术界和产业界巨大的研究热情。随着“元宇宙”概念的提出，对高性能三维显示设备与技术的需求越发迫切。全息术是一种理想的三维显示方案，但传统光场调控器件却存在视场角狭窄、信息容量小等问题，阻碍了全息技术的进一步发展。而超表面作为一种新型光场调控器件，有望利用其像素尺寸小和光场调控能力强的特点在全息技术领域实现新的突破。本文主要从超表面全息器件的设计流程、调制方式、动态实现、制造技术四个方面给出了超表面全息十余年的概貌，并提出该领域未来发展的方向。
Abstract:The pursuit of real-time, full-color, three-dimension (3D), and dynamic display has inspired a rich body of industrial and academic research. With the introduction of "Metaverse", there is an increasing demand for high-performance 3D display devices and technologies. Holographic technology is an ideal approach for future naked-eye 3D display. However, traditional dynamic holographic devices have brought many shortcomings such as small field of view (FOV) and limited information capacity, which hinder the practical applications. As a new class of light field modulator, metasurface is expected to achieve remarkable breakthroughs in the field of holographic display with the advantages of their small pixel size and the emerging ability to manipulate light. This paper gives an overview of the development of meta-holography from four aspects: the design strategy, the modulation principle, the methods for realizing dynamic display and the micro-nano fabrication technologies for optical metasurface. We finally include a brief discussion of the future direction in this field.
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Overview: As an ideal 3D display technology, holography can reconstruct the wavefront of the whole light wave, and can provide all the 3D depth cues required by the human eyes, including binocular parallax, motion parallax, accommodation, occlusion, etc. Due to the limitation of the modulation principle, DMD and most SLM cannot optically reconstruct the complex amplitude of a wavefield, resulting in partial information loss and complex wavefront calculation. At the same time, the two devices have a pixel size larger than 6 μm, which is much larger than the wavelength of visible light. The limitation of large pixel size and modulation principle brings many disadvantages, such as narrow field of view, twin-image, narrow band, and multi-order diffraction, which greatly restrict the development of CGH. As a new class of light field modulators, metasurface can control the amplitude, phase, polarization and dispersion of the light simultaneously by optimizing the design and arrangement of the elements. Thanks to the previous exploration of micro-nano manufacturing technology and materials for metasurface, the size of the unit cell can be reduced to the order of sub-wavelength. According to the grating equation, the smaller the pixel size is, the larger the diffraction angle is. Therefore, metasurface can provide a diffraction angle close to 90°. As the loading medium of holograms, metasurface meets the requirements of holograms for high-precision and complex light field modulation and has the advantages of high design freedom, high spatial resolution, low noise, broadband and so on, providing a solution to some problems currently faced by CGH. In this paper, the basic process of designing meta-holography devices is discussed. Furthermore, the basic concepts and development of static meta-holography are introduced based on the principles of metasurfaces, including phase modulation, amplitude modulation, complex-amplitude modulation, and nonlinear modulation. However, such static meta-holography devices cannot change the display patterns after design and manufacture, which is inconsistent with the rapidly changing real world and requirements of diverse functions, limiting its applications. Therefore, the two methods of realizing dynamic meta-holography are introduced in detail. Finally, the micro-nano fabrication technologies for metasurface are discussed. In conclusion, this paper presents the design, principle, development, and manufacturing implementation of meta-holographic devices in an all-around way, and puts forward problems and possible solutions for the development of meta-holography at present.
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图 1 基于超表面的计算全息器件设计流程。(a) 简要的超表面全息器件设计过程；(b) 以几何相位调控超表面为例的全息器件设计过程
Figure 1. Design strategies for CGH devices based on metasurface. (a) Brief design strategy of meta-holographic devices; (b) Design process of holographic devices using metasurface based on geometric phase as an example
图 2 静态超表面全息。(a) 基于金纳米天线的几何相位调制3D轴上透射式全息图[32]；(b) 两个具有集合关系的纳米筛振幅调制全息图[40]；(c) 通过调整单元结构的取向角和几何参数来实现复振幅调制，分别重建了波长1.65 μm和0.94 μm入射下的全息图像[42]；(d) 基于C形Si纳米天线的THG非线性调制青色和蓝色全息图[43]
Figure 2. Static meta-holography. (a) PB phase-modulated 3D on-axis transmission holograms based on gold nanoantennas[32]; (b) Two amplitude-modulated holograms of photon sieves with set relation[40]; (c) Complex amplitude modulation is achieved by adjusting the orientation angle and geometric parameters of the cell structure, and the holographic images at the wavelengths of 1.65 μm and 0.94 μm are reconstructed respectively[42]; (d) THG nonlinear modulated cyan and blue holograms based on C-shaped Si nanoantennas[43]
图 3 超表面全息技术示意图。(a) 静态超表面全息器件；(b) 多路复用超表面全息器件，通过改变前端入射光的光参量可以实现动态显示；(c) 主动式超表面全息器件，超表面器件本身可以响应光电热化学等刺激而产生变化
Figure 3. Schematic of meta-holography. (a) Static meta-holography; (b) Multiplexed meta-holography, which means dynamic display can be realized by controlling the fundamental properties of incident light; (c) Active meta-holography, which means metasurface itself can be changed in response to optical, electrical, thermal, or chemical stimuli
图 4 波长复用的超表面全息器件用于彩色全息的不同实现方法。(a) 空间交错排列型[64]；(b) 多层设计及改进的GS算法[68]；(c) 色散调控[70]；(d) 结合角度复用技术[73]
Figure 4. Different methods for wavelength-multiplexed meta-holography to realize color holography. (a) Spatially staggered arrangement[64]; (b) Multilayer design and adjusted GS algorithm[68]; (c) Dispersion phase-based metasurface[70]; (d) Combined with angle multiplexing technology[73]
图 5 角度复用和偏振复用型超表面全息术。(a) 角度复用型超表面全息器件，可以分别在0°和30°入射角情况下显示不同的全息图案[77]；(b) 结合纳米打印设计，可以实现四种不同图像的显示[80]；(c) 利用传输相位结合几何相位实现左右旋圆偏振复用的设计方案[86]；(d) 同时在近场记录一幅连续的灰度纳米打印图像并在远场投影两幅独立的全息像[87]；(e) 利用机器学习逆向设计实现以超大视场角(94°)和高衍射效率(78%)重建三维的矢量全息图像[92]
Figure 5. Angle multiplexed and polarization multiplexed meta-holography. (a) Angle-multiplexed meta-holography, which can display different images at 0° and 30° incident angles, respectively[77]; (b) Combined with nanoprinting and four different images can be projected[80]; (c) Combine the propagation phase with the geometric phase to realize the multiplexing of LCP and RCP[86]; (d) Simultaneously record a continuous grayscale nanoprinting image in the near field and project two independent holographic images in the far field[87]; (e) Three-dimensional vectorial holography with a large field of view (94°) and high diffraction efficiency (78%) based on machine learning inverse design[92]
图 6 OAM复用、空间复用和非互易超表面全息术。(a) 离散空间频率分布的OAM复用超表面全息器件设计[98]；(b) 可见光波段多动量介质超表面转换器[100]，比例尺：20 μm；(c) 空间复用型超表面器件，以类似电影放映的方式实现动态全息视频显示[101]；(d) 空间复用型超表面器件，可实现电影放映式动态全息显示或者结合结构光实现228个不同的帧显示[102]；(e) 利用模板实现的空间信道选择超表面器件[104]；(f) 非互易型超表面全息器件[108]
Figure 6. OAM multiplexed, space channel multiplexed and nonreciprocal meta-holography. (a) OAM-multiplexed meta-holography with discrete spatial frequency distribution[98]; (b) Dielectric multi-momentum meta-transformer in the visible[100], scale bar: 20 μm; (c) Space channel multiplexed metasurface, which can realize dynamic holographic video display in a way similar to cinematography[101]; (d) Space channel multiplexed metasurface, which can realize cinematography-inspired dynamic holographic display and display 228 different frames with structured laser beam[102]; (e) Space channel selecting metasurface realized by a template[104]; (f) Nonreciprocal meta-holographic device[108]
图 7 衍射光场复用型超表面全息器件。(a) 衍射光场复用型全息器件，可以通过利用空间光调制器改变入射光场实现动态显示[110]；(b) 级联超表面，可以在单层或多层叠加的情况下显示不同的全息图像[111]；(c) 利用两个级联超表面的面内旋转，引入旋转复用的概念，从而展示不同的图像[112]
Figure 7. Diffracted light field multiplexed meta-holography. (a) Diffracted light field multiplexed meta-holography, which can realize dynamic display by changing the incident light field with spatial light modulators[110]; (b) Cascaded metasurface, which can display different holographic images in the mood of single-layer or multi-layer[111]; (c) Use the in-plane rotation between two cascaded metasurface to introduce the concept of the rotational multiplexing method and display different images[112]
图 8 基于超表面复用全息术的应用。(a) 一种左右旋偏振复用全息器件用于气体传感，通过结合液晶材料，可以在不同的气体浓度下改变入射光的圆偏振特性在两个图像之间切换[117]；(b) 码分复用型超表面器件[118]；(c) 一种矢量全息器件，可以控制全息像面的相位信息，使在特定的输入输出条件下隐藏或显示图像信息[119]
Figure 8. Applications based on multiplexed meta-holography. (a) A polarization-multiplexed holographic device for gas sensing by combining liquid crystal materials and the circular polarization of incident light can be switched under different gas concentrations which leads to holographic image switching between two images[117]; (b) Code division multiplexed metasurface[118]; (c) A vectorial holographic device can control the phase information of the holographic image plane to hide or display image information under specific input and output conditions[119]
图 9 主动式超表面全息。(a) 基于GST相变特性的可切换自旋霍尔效应、涡旋光束产生和全息术[126]；(b) 基于Mg氢化/脱氢特性的动态超表面全息[132]；(c) 基于可拉伸PDMS基底的全息图像动态切换显示[135]
Figure 9. Active meta-holography. (a) Switchable spin Hall effect, vortex beam generation and holography based on GST phase transition properties[126]; (b) Dynamic metasurface holography based on Mg hydrogenation/dehydrogenation properties[132]; (c) Dynamic switching display of holographic image based on stretchable PDMS substrate[135]
图 10 主动式超表面全息。(a) 基于对环境敏感的MIM结构的可切换超表面全息术[138]，比例尺：40 μm；(b) 用于光投影显示的电控数字超表面设备[143]；(c) 通过飞秒激光脉冲还原氧化石墨烯进行折射率调制以实现宽视场角3D全息图[148]
Figure 10. Active meta-holography. (a) Switchable meta-holographic device based on environmentally sensitive MIM structures[138], scale bar: 40 μm; (b) Electronically controlled digital metasurface for optical projection display[143]; (c) Refractive index modulation by femtosecond laser pulse reduction of to achieve wide-FOV 3D holograms[148]
图 11 光学超表面微纳制造方法。(a) 电子束曝光；(b) 聚焦离子束；(c) 光刻；(d) 等离子体腔光刻；(e) 纳米压印；(f) 双光子聚合激光直写技术
Figure 11. Micro-nano fabrication technologies for optical metasurfaces (a) Electron beam lithography; (b) Focused ion beam; (c) Photolithography; (d) Plasmonic cavity lithography; (e) Nanoimprint lithography; (f) Two-photon polymerization laser direct writing
表 1 单色静态全息显示代表性工作
Table 1. Representative works of single-wavelength static holographic display
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表 4 其他功能化应用的代表性工作
Table 4. Representative works of other functionalized applications
工作机理 工作模式 波长/nm 材料 功能 参考文献 波长复用 透射式 473、532、633 Si 多功能集成 [75] 角度复用 反射式 915 a-Si 全息加密、多功能集成 [77] 透射式 405 Au 全息加密、多功能集成 [81] 偏振复用 透射式 480 TiO2 全息加密、多功能集成 [87] 透射式 633；532 a-Si:H；功能性UV光刻胶，包含TiO2纳米粒子 传感 [117] OAM复用 透射式 632 GaN 高信息容量存储、全息加密、多功能集成 [98] 空间复用 透射式 633 a-Si 多功能集成 [103] 传输方向复用 透射式 632.8 a-Si:H 全息加密、多功能集成 [108] 衍射光场复用 透射式 740 Si 全息加密 [111] 相变材料调制 透射式 800(控制光)、
1550(探测光)GST-Al 全息加密 [128] 化学反应调制 反射式 633 Mg/Ti/Pd、Au、Mg/Ti/Pd/Cr 传感、全息加密 [132] 反射式 633 Mg/Ti/Pd-HSQ-SiO2-Ag 传感、多功能集成 [134] 机械调制 透射式 632.8 Au-PDMS 传感 [135] 介质环境调制 反射式 800；710、890 Au-SiO2-Au 传感 [138] 热调制 透射式 633 聚烯烃 传感、全息加密 [149] 备注：“/”代表参考文献中没有相关数据。
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