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摘要:
作为三维超构材料的衍生物，具有亚波长厚度的人工超构表面结构能够在紧凑的平台上灵活操纵光与物质的相互作用，有利于多功能、超紧凑光子器件的研发，对于微纳光子学和集成光子学具有重要意义。铁电晶体铌酸锂凭借其跨越可见光至中红外波段的宽透明窗口以及较大的非线性光学、电光系数，被认为是最有前途的多功能集成光子平台之一。近年来，基于铌酸锂薄膜(lithium-niobate-on-insulator，LNOI)的集成光子学器件研究也得到了迅猛发展。本文总结了几种有潜力制备高质量铌酸锂超构表面的微纳加工技术，同时介绍了近年来铌酸锂超构表面结构的研究进展，并对其未来的研究方向进行了展望。
Abstract:As derivatives of 3D metamaterials, artificial metasurface structures with sub-wavelength thicknesses can flexibly manipulate light-matter interactions in a compact manner, which is beneficial for the fabrication of multi-functional and ultracompact photonic devices. Therefore, metasurface structures are of great significance for micro-nano photonics and integrated photonics. The ferroelectric crystal lithium niobate is regarded as one of the most promising multifunctional integrated photonic platforms due to its wide transparent window spanning from the visible to the mid-infrared band as well as large nonlinear optical and electro-optic coefficients. In recent years, research on integrated photonics devices based on lithium-niobate-on-insulator (LNOI) thin films has also been developed rapidly. In this paper, several micro-nano processing technologies that have the potential to prepare high-quality lithium niobate metasurfaces are summarized. At the same time, the research progress of lithium niobate metasurface structures in recent years is introduced, and its future research directions are prospected.
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Key words:
- metasurface /
- lithium-niobate /
- micro-nanofabrication /
- nonlinear optics
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Overview: Two-dimensional metasurfaces constructed from sub-wavelength size meta-atoms can flexibly control the local distribution of electromagnetic fields, which has attracted extensive attention in recent years. The polarization, phase and amplitude of electromagnetic waves can be controlled with subwavelength resolution by properly designing the nanostructure of the metasurfaces. Compared with 3D metamaterials, 2D metasurfaces can not only greatly alleviate the high resistance losses accumulated in traditional metamaterials, but also avoid the manufacturing requirements of complex 3D nanostructures. In addition, the sub-wavelength thickness of the metasurfaces has significant integration advantages, which makes it possible to develop ultra-compact photonic devices with a variety of optical functions, which is of great significance to micro/nano photonics and integrated photonics. Especially in the field of nonlinear optics, metasurfaces can alleviate or even completely overcome the requirement of phase matching to some extent, thus showing a strong nonlinear optical response. Metal materials exhibit significant ohmic losses in other wavebands except microwave, resulting in a relatively low optical quality factor of traditional plasmonic metasurfaces, which also limits their application in many functional nano-photonic devices. Furthermore, some precious metals (such as gold and silver, etc.) are not only expensive to manufacture, but also incompatible with traditional Complementary Metal Oxide Semiconductor (CMOS) processes. In view of this, dielectric metasurfaces compatible with semiconductor technology have gradually become a research focus. Ferroelectric lithium niobate (LiNbO3) is known as "optical silicon" because of its transparent window from visible to mid-infrared band (0.35-5 μm), relatively high refractive index, excellent electro-optic (EO) and second-order nonlinear optical properties, as well as excellent acoustooptic and piezoelectric properties. These unique properties make lithium niobate one of the most widely used materials in photonics, and it is an ideal substrate material for realizing efficient dielectric metasurfaces.
With the rapid development of lithium-niobate-on-insulator (LNOI) thin film technology and related surface micro-nano manufacturing technology in recent years, a series of high-quality and high-performance photonic functional devices on lithium niobate chip have been realized, such as compact modulators with ultra-high performance, broadband frequency combs, as well as high-efficiency optical frequency converters and single-photon sources. Great progress has been made in nonlinear optical frequency conversion, electro-optic modulation and optical passivity. In this paper, we briefly introduce several micro-nano processing technologies that have the potential to produce high-quality lithium niobate metasurfaces, and summarize the recent research progress in optical frequency conversion, electro-optic modulation, optical passivity and other aspects of lithium niobate metasurfaces, and prospected the potential research directions in the field of micro-nano optics.
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图 1 LNOI片上微纳光子学结构制备的主要流程图：图案化处理；图案转移；后处理过程
Figure 1. The main flow chart of fabrication of photonic structure on the LNOI chip: patterned processing; pattern transfer; post-processing
图 2 (a) 铌酸锂超构表面SHG示意图；(b) 制备工艺流程示意图；(c) 所制备超构表面的SEM图像，其中纳米谐振腔由截断金字塔和下面的残余层组成[64]
Figure 2. (a) A schematic of the SHG from the lithium niobate metasurface; (b) Schematic illustration of the process flow of fabrication; (c) SEM image of the fabricated metasurface in which the nanoresonator consists of a truncated pyramid and a residual layer underneath[64]
图 4 采用紫外光刻结合RIE技术制备微环腔，然后用CMP抛光侧壁。(a) 制备工艺流程示意图；(b) 微环腔SEM图像；CMP前(c)后(d)微环腔侧壁的放大SEM图像[75]
Figure 4. Microring fabricated by UV lithography and RIE, followed by sidewall polishing by the CMP. (a) Schematic illustration of the process flow of fabrication; (b) False-color SEM image of the microring; and enlarged SEM image of the sidewall (c) before and (d) after the CMP[75]
图 5 (a) 非线性铌酸锂超构表面的SHG示意图。左下插图为D=600 nm的超构表面截面的典型SEM图像，右下插图显示了研究中使用的铌酸锂薄膜的测量二阶极化率；(b) 超构表面SHG效率的光谱依赖性[101]
Figure 5. (a) A schematic of the SHG from the nonlinear lithium niobate metasurface. Left inset gives a typical SEM image of cross section of the metasurface with D=600 nm. Right inset presents the measured second-order susceptibility of the lithium niobate film used in this study; (b) Spectral dependence of SHG efficiencies from metasurfaces[101]
图 6 (a) 铌酸锂超构表面的SPDC：泵浦光从基板侧入射，光子对在反射中收集。泵浦和SPDC光子都沿铌酸锂光轴z偏振；(b) 从量子光学超构表面测量的SPDC光谱。灰色星显示来自未图案化铌酸锂薄膜的SPDC光谱[112]
Figure 6. (a) SPDC from a lithium niobate metasurface: the pump is incident from the substrate side, photon pairs are collected in reflection. Both the pump and the SPDC photons are polarized along the lithium niobate optic axis z; (b) Measured SPDC spectra from quantum optical metasurfaces. Gray stars show the SPDC spectrum from the unpatterned lithium niobate film[112]
图 7 (a) 由金电极驱动的超构表面结构。左下插图为超构表面柱结构的SEM图像，右下插图显示了电极(黄色)之间几个超构表面(紫色)的伪色SEM；(b) 半径为 135 nm、周期为 500 nm 的超构表面的透射率(蓝色线)，橙色线表示 2 VPP和 180 kHz 的交流电压下的调制增强(定义为超构表面的调制幅度除以未图案化区域的调制幅度)[65]
Figure 7. (a) Metasurface driven by Au electrodes. The lower left inset shows the SEM image of the metasurface pillar structure. The lower right inset shows a false-color SEM of several metasurfaces (purple) between the electrodes (yellow); (b) Measured transmission (blue) of a metasurface with radius 135 nm and period 500 nm, normalized by the transmission of an unstructured area. The orange line shows the modulation enhancement, defined as the modulation amplitude of the metasurface divided by the modulation amplitude of an unpatterned area, for an AC voltage of 2 Vpp and 180 kHz[65]
图 8 (a) 集成梯度超构表面的LiNbO3片上脊波导，用于实现无相位匹配的二次谐波产生; (b) 基于超构表面无相位匹配的二次谐波产生原理图[88]
Figure 8. (a) Schematic of the LiNbO3 on-chip ridge waveguide integrated with a well-designed gradient metasurface for achieving phase-matching-free second harmonic generation; (b) Conceptual diagram of the metasurface-based phase-matching-free second harmonic generation[88]
表 1 超构表面SHG主要性能参数
Table 1. Main performance parameters of metasurface SHG
Meta-atoms Size Process technology FH intensity FH wavelength SH wavelength Conversion efficiency Truncated pyramid[59] PT=870 nm
L=700 nmEBL+IBE 4.3 GW/cm2 ~1550 nm ~775 nm ~10−6 Ridge waveguide[86] D=600 nm
d=85 nm
h=235 nmFIB 2.05 GW/cm2 740 nm~1000 nm 370 nm~500 nm 2×10-6 Cylinder[65] PC=590 nm
R=175 nmFIB 0.5 GW/cm2 825 nm 412 nm 2.9×10−8 
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