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摘要:
由传统光纤拉锥形成的直径为几百纳米到几微米的微光纤具有大倏逝场、强光场束缚能力、高光学非线性、易于弯曲的可塑性和兼容现有光纤系统的便利性等优势，为发展小型和功能集成的全光纤器件提供了高自由度的平台。作为基础的光电子器件之一，光学谐振器在光通信、传感、信号处理、量子光学等领域具有很大的研究价值，被广泛应用。传统光学微谐振器多基于光刻技术，制备工艺条件相对复杂。而随着微光纤制备技术的成熟，基于微光纤的光学谐振器也被提出并逐步发展。微光纤光学谐振器是一种基于倏逝场耦合的近场光学耦合器件，具有低插入损耗、高精细度、易于制造以及与光纤系统良好兼容性等诸多优点，可应用于滤波器、传感器、光调制器和光纤激光等诸多领域。本文从微光纤光学谐振器的基本原理、器件制备、应用等方面介绍了该领域的相关进展。
Abstract:Microfibers tapered from conventional optical fibers with diameters ranging from hundreds of nanometers to several micrometers possess various advantages including large evanescent field, strong light confinement, high optical nonlinearity, flexible configurability, and low-loss connection to other fiberized systems, which makes it an open platform for miniaturization and integration of all-fiber devices. As a fundamental opto-electronic component, optical resonators have got comprehensively researched and widely applied in the fields of optical communication, sensing, signal processing, and quantum photonics. Traditional optical resonators are fabricated through lithography which is relatively complicated. With the maturation of microfiber fabrication methods, optical resonator based on optical microfibers was demonstrated and developed. As an optical coupling device based on evanescent field coupling, the microfiber resonator features in low insertion loss, high finesse, easy fabrication, and compatibility with fiber systems. It can be utilized in domains of filter, sensor, modulator, and fiber laser. In this article, we summarize the recent progress in the microfiber resonators research fields, covering fundamental characteristics, fabrication methods, and applications of microfiber resonators.
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Key words:
- microfiber /
- resonator /
- optical fiber sensing /
- optical modulation
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Overview: Microfibers tapered from conventional optical fibers with diameters ranging from hundreds of nanometers to several micrometers possess various advantages including large evanescent field, strong light confinement, high optical nonlinearity, flexible configurability, and low-loss connection to other fiberized system, which makes it an open platform for miniaturization and integration of all-fiber devices. Nowadays microfiber can be easily obtained through mature fabrication method like flame-brushing technique. On the other hand, as a fundamental opto-electronic component, optical resonators have got comprehensively researched and widely applied in the fields of optical communication, sensing, signal processing, and quantum photonics, including whispering-gallery-mode cavities like micro-ring, micro-cylinder, micro-toroid, and micro-sphere. These traditional optical resonators are fabricated through lithography which is relatively complicated. With the maturation of microfiber fabrication methods, optical resonators based on optical microfibers have been demonstrated and developed, such as microfiber loop resonators, microfiber knot resonators, and microfiber coil resonator. As an optical coupling device based on evanescent field coupling, the microfiber resonator features in low insertion loss, high Q-factor, high finesse, excellent mechanical stability, easy fabrication process, and compatibility with fiber systems, providing a broad platform for all-fiberized miniatured devices of probing and modulation. Through further integration with exterior functional materials and microfabrication techniques, a microfiber resonator can be utilized in diverse domains of sensor, filter, modulator, and fiber laser, as well as quantum photonics and nonlinear optics, realizing the ‘lab on fiber-ring’. In the field of sensing, the microfiber resonators get exploited as the refractometric sensor, concentration and humidity sensor, temperature and current sensor, mechanical pressure sensor, microfluidic sensor, magnetic field sensor, acceleration sensor, etc., where the devices exhibit high adaptability and excellent sensitivity. As to optical signal processing, the device can be used as the single wavelength or multi-wavelength filter, code-type conversion, and optical modulation. The intensity and phase of light can be tuned to a large scale within broad wavebands, and the modulation response time is also reduced to achieve high-speed modulation. Furthermore, the microfiber resonator can be used as an optical delay line or generator of second harmonic or third harmonic. When applied into fiber laser, the microfiber resonators help build the stable light source with narrow linewidth single frequency or multiwavelength laser with high uniformity. The devices integrated with metal or 2D materials also make the laser operate under conventional soliton mode-locking or dissipative four-wave-mixing mode-locking regime and output sub-picosecond pulsation, broadening the dynamics of ultrafast optics. In this article, we summarize the recent progress in the microfiber resonators research fields, covering fundamental principles and characteristics, fabrication methods, and applications of microfiber resonators.
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图 3 (a) 不同直径的阶跃型光纤HE11和HE12模的有效折射率；(b) 包层直径分别为80 μm及20 μm时的模场分布[25]； (c) 800 nm波长下微光纤不同高阶模有效折射率随直径的变化
Figure 3. (a) Effective refractive index of HE11 and HE12 mode for step-index fiber with varied diameter; (b) Cross-section mode field distribution of fiber with cladding diameter of 80 μm and 20 μm[25]; (c) Variation of effective refractive index for high-order modes in microfiber versus diameter at wavelength of 800 nm
图 4 微光纤谐振器。 (a) 环形谐振器；(b) 结形谐振器；(c) 线圈形谐振器
Figure 4. Microfiber resonators. (a) Microfiber loop resonator; (b) Microfiber knot resonator; (c) Microfiber coil resonator
图 5 (a) 微光纤线圈的自然坐标系；(b) 柱坐标下的微光纤线圈；(c) 两个相邻线圈的截面
Figure 5. (a) Natural coordinate system of MCR; (b) MCR under cylindrical coordinates; (c) Cross-section of adjacent microfibers
图 6 微光纤谐振器的特征参数。 (a) 群延迟谱；(b) 色散；(c) 透射谱
Figure 6. Parameters of microfiber resonator. (a) Group delay; (b) Dispersion; (c) Transmission spectrum
图 8 (a) “扫火法”系统示意图；(b)石英材料微光纤的扫描电镜照片
Figure 8. (a) Schematic diagram of flame-brushing technique; (b) SEM image of a silica microfiber
图 9 微光纤谐振器的制备。 (a) MLR的制备；(b) MKR打断式制备；(c) MKR完整式制备；(d) MKR样品实物显微照片；(e) 三圈MCR样品实物显微照片；(f) MCR的制备；(g) 石墨烯集成MCR的制备
Figure 9. Fabrication of microfiber resonator. (a) Fabrication of MLR; (b) MKR’s cutting-end fabrication; (c) MKR’s complete fabrication; (d) Microscopic image of MKR; (e) Microscopic image of MCR; (f) Fabrication of MCR; (g) Fabrication of graphene-integrated MCR
图 10 封装后温度敏感度随微光纤直径的变化
Figure 10. Temperature sensitivity as a function of the microfiber radius after package
图 11 微光纤谐振器传感。(a) 基于MLR的折射率传感器[52]；(b) MKR与氧化石墨烯集成的气体传感器[62]；(c) 基于MKR的温度传感器[64]；(d) 基于石墨烯集成MCR的电流传感器；(e) 混合等离激元MKR；(f) 柔性可穿戴HPMKR传感器；(g) 基于MKR的光纤水听器[39]；(h) MCR微流体传感器；(i) 基于MCR的三维立体光栅
Figure 11. Sensors based on microfiber resonators. (a) Refractometric sensor based on MLR[52]; (b) Graphene oxide deposited MKR for gas sensing[62]; (c) Temperature sensor based on MKR[64]; (d) Current sensor based on graphene-integrated MCR; (e) Hybrid-plasmonic MKR; (f) Soft and wearable HPMKR sensor; (g) Fiber hydrophone based on MKR[39]; (h) Microfluidic sensor based on MCR; (i) 3D-stereo grating based on a microstructured rod with MCR
图 12 光信号处理。(a) MCR宽带起偏器[38]；(b) 石墨烯集成MCR全光调制器[81]；(c) 石墨烯集成MCR全光调制器的偏振相关调制[81]；(d) 石墨烯集成MKR全光调制器[82]；(e) WS2集成MKR全光调制器[83]；(f) MCR光延迟线[84]
Figure 12. Optical signal processing.(a) MCR broad band polarizer[38]; (b) Graphene-integrated MCR all-optical modulator[81]; (c) Polarization-dependent modulation of graphene-integrated MCR all-optical modulator[81]; (d) Graphene-integrated MKR all-optical modulator[82]; (e) WS2-integrated MKR all-optical modulator[83]; (f) MCR delay line[84]
图 13 应用于光纤激光器的微光纤谐振器。(a) 微光纤谐振器的激光应用形式；(b) 基于微光纤谐振器的光纤激光器运转模式
Figure 13. Application of microfiber resonators in fiber laser.(a) Application schemes of microfiber-resonator-based fiber laser; (b) Operation regimes of microfiber-resonator-based fiber laser
表 2 基于微光纤谐振器的传感器件
Table 2. Sensors based on microfiber resonators
谐振器类型 测量对象 灵敏度 参考文献 浓度传感 MCR 异丙基浓度 40 nm/RIU [51] MLR 酒精浓度
甘油浓度17.8 nm/RIU
109.7 nm/RIU[52] MLR 海水盐度 1000 nm/RIU 或 2 nm/% [53] MKR 甲醇、乙醇、丙醇、异丙醇浓度 / [54] MKR NaCl浓度 1.7 nm/% [55] MKR NaCl浓度 0.2 nm/% [56] MKR 湿度 1.2 pm/% (石英光纤)
8.8 pm/% (聚合物光纤)[57] MLR 湿度 1.8 pm/% [58] MKR 湿度 5.95 pm/% [59] MKR 湿度 1.53 nm/% [60] MKR NH3分子浓度
CO分子浓度0.35 pm/ppm
0.17pm/ppm[62] MCR Pb2+离子浓度 702 pm/ppm [63] 温度传感 MKR 温度 280 pm/℃ [65] MKR 温度 266 pm/℃ [64] MLR 温度 0.043 dB/℃ [66] MKR 电流 0.0513 nm/A2 [67] MCR 电流 220.65 nm/A2 [68] MCR 电流 6.7297×104 nm/A2 [69] 应力传感 MKR 压强 51.2 pm/kPa [33] MKR 压强 16.02 pm/kPa [71] MKR 压强 −288 dB re (μPa)−1 [39] 其它 MKR 加速度 29 pm/G [73] MKR 磁场 ~ 0.3 pm/Oe [74] 
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表 3 基于微光纤谐振器的光信号处理
Table 3. Signal processing based on microfiber resonators
谐振器类型 应用方式 性能参数 参考文献 滤波器 工作波长/nm FSR/nm 精细度 对比度/dB 插损/dB MLR 滤波 840 3.2~3.8 4.3 10 0.97 [75] MKR 通信码型转换 1550 0.32~0.64 / > 10 8 [77] MLR 上下载滤波 1550 0.3~0.64 4~6.5 3.7~7.5 2.5 [78] MKR 滤波 4600 2~9.6 10.2 4~8 > 4 [80] 调制器 工作波长/nm 调制深度/dB 调制效率/(dB/mW) 上升/下降时间/ms MCR 全光调制 1550 7.5 0.2 / [81] MKR 全光调制 1550 7.4 0.02 / [82] MKR 全光调制 1550 17.1 0.4 120/100 [83] MKR 全光调制 1550 12.7 0.5 2.8/3.3 [86] MKR 全光调制 1550 12.9 0.26 0.306/0.301 [87] MKR 热光调制 1550 13.4 / 0.0908/0.0897 [88] 非线性 泵浦光波长/nm 信号光波长/nm 转换效率 谐振腔增强因子 MLR 二次谐波产生 1550 775 2.4 × 10−7 5.7 [89] MLR 三次谐波产生 1550 516.7 1.8 × 10−5 5.9 [90]
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表 4 基于微光纤谐振器的光纤激光
Table 4. Fiber laser based on microfiber resonators
谐振器类型 性能参数 参考文献 单波长激光器 中心波长/nm 线宽/pm 对比度/dB 输出功率/μW MKR 1541.1 50 47 8 [34] MKR 1536 3.2 × 10−4 38 0.9575 [94] MKR 1560.6 16 60 / [95] MKR 1550.772 16 60.6 8 × 103 [96] 多波长连续激光器 中心波长/nm FSR/nm 波长通道数 MKR 567~580 0.21 6 [46] MKR 1528.3~1561.3 0.184 11 [97] MKR 1564 0.09 42 [98] MKR 1546.95~1562.29 0.813 1~4 [99] MCR 1882.5 0.54 12 [100] MKR 1965 5.8 3 [101] 多波长脉冲激光器 中心波长/nm FSR/nm 波长通道数 重复频率 脉宽/ps MKR 1535 1.12 7 5.3 MHz 16.3 [103] MKR 1045
15610.59
0.864
6162 GHz
106.7 GHz< 6.17
<9.37[104] MKR 1560 0.33~1.16 > 3 41 GHz~144 GHz 6.6 [40] MLR 1555 0.46 > 3 57.8 GHz 3.4 [105] MKR 1533
15480.22 15
/27.4 GHz
15.5/140 MHz1.55
1.36/1.45[106]
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