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超分辨弱旁瓣硅基超构透镜

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文章导航 > 光电工程 > 2022 Vol. 49 > No. 11 > 220258

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张坤，马子杰，周毅，等. 超分辨弱旁瓣硅基超构透镜[J]. 光电工程，2022，49(11): 220258. doi: 10.12086/oee.2022.220258
引用本文: 张坤，马子杰，周毅，等. 超分辨弱旁瓣硅基超构透镜[J]. 光电工程，2022，49(11): 220258. doi: 10.12086/oee.2022.220258
shu
Zhang K, Ma Z J, Zhou Y, et al. Silicon-based super-resolution metalens with weak sidelobe[J]. Opto-Electron Eng, 2022, 49(11): 220258. doi: 10.12086/oee.2022.220258
Citation: Zhang K, Ma Z J, Zhou Y, et al. Silicon-based super-resolution metalens with weak sidelobe[J]. Opto-Electron Eng, 2022, 49(11): 220258. doi: 10.12086/oee.2022.220258
shu

超分辨弱旁瓣硅基超构透镜

    • 1.

      重庆大学光电工程学院，重庆 400044

    • 2.

      重庆大学光电技术及系统教育部重点实验室，重庆 400044

  • 基金项目:
    国家自然科学基金资助项目(61927818，61575031)；国家重点基础研究发展计划资助项目(2013CBA01700)
详细信息
    作者简介:
  • 张坤(1988-)，男，博士研究生，主要从事超分辨光学器件、微纳加工等研究。E-mail: kunzhang@cqu.edu.cn;
  • 周毅(1991-)，男，博士，毕业于中国科学院光电技术研究所，后到爱尔兰国立大学做博士后工作，现工作于重庆大学光电工程学院。主要从事光学超分辨显微成像技术和光学相干断层成像(OCT)研究。E-mail: yi_zhou@cqu.edu.cn
    • *通讯作者: 周毅，yi_zhou@cqu.edu.cn

  • 中图分类号: O436.3

Silicon-based super-resolution metalens with weak sidelobe

    • 1.

      College of Optoelectronic Engineering, Chongqing University, Chongqing 400044, China

    • 2.

      Key Laboratory of Optoelectronic Technology and Systems Ministry of Education, Chongqing University, Chongqing 400044, China

  • Fund Project: National Natural Science Foundation of China (61927818，61575031), and China National Key Basic Research and Development Program (2013CBA01700).
More Information
    摘要

  • 超表面是一种空间变化的超薄纳米结构，在光学超分辨聚焦透镜或系统中已经得到广泛研究和应用。然而，随着超构透镜聚焦光斑缩小，不可避免产生大旁瓣，限制了透镜视场和应用潜力。本文提出了一种设计大数值孔径(NA=0.944)超分辨弱旁瓣超构透镜的方法。针对波长λ=632.8 nm的圆偏振光，基于硅基超表面PB相位调控，实现了超分辨弱旁瓣点聚焦超构透镜。实验证明，可以实现聚焦光斑半高全宽FWHM=0.45λ，小于衍射极限0.53λ (衍射极限为0.5λ/NA)，旁瓣比Sidelobe Ratio (SR)=0.07。该透镜的应用有望实现超分辨光学器件或系统微型化、轻量化和集成化。

    Metasurface is a spatially varying ultrathin nanostructure that has been widely studied and used in optical super-resolution focusing, either in lenses or in systems. However, with the decrease of the focal spot size of the metalens, large sidelobes are inevitably generated, limiting the field of view and potential applications of the lens. In this paper, a method for producing super-resolution metalens with a large numerical aperture (NA=0.944) and weak sidelobe is presented. For a circularly polarized light with the wavelength of λ=632.8 nm, a super-resolution point-focusing with a weak sidelobe is realized based on PB phase regulation of silica-based metasurface. Experimental results show that the FWHM (full-width at half maximum) of our focusing spot is 0.45λ, which is less than the diffraction limit of 0.53λ (the diffraction limit is 0.5λ/NA), and the sidelobe ratio (SR) is 0.07. Our proposed super-resolution metalens bears the potential to realize the miniaturization, lightweight and integration of super-resolution optical devices or systems.

    • Overview

  • Overview: Optical super-resolution lenses have shown great potential in super-resolution microscopic systems and nano-fabrication systems. With the decrease of the focusing spot of the super-resolution lens, it is inevitable that large sidelobes and sidebands will be generated, which will lead to a limited field of view and imaging artifacts. Therefore, when designing super-resolution optical devices, it is necessary to adopt a balanced strategy between focusing spot and side lobe according to the practical applications. Metasurface is a planar structure composed of nanoscale meta-atoms, which can flexibly regulate the amplitude, phase and polarization of the optical field, being beneficial to construct complex super-resolution optical fields. The PB phase meta-atom is comparatively easy to fabricate due to its simplicity. Using Finite-Difference Time-Domain (FDTD) solutions to optimize the size of the meta-atom, we can get a structure with high transmittance. By rotating the angle of the meta-atom, we can achieve linear phase control. The application of PB phase metasurface has been demonstrated in the field of super-resolution focusing devices with suppressed sidelobe. Based on the vector angular spectrum method and particle swarm optimization (PSO) algorithm, a super-resolution point focusing lens with a large numerical aperture and weak sidelobe is optimally designed with a 32-valued phase control at the wavelength of λ=632.8 nm. Based on the silicon-based PB phase metasurface, our metalens was fabricated by electron beam lithography and orthoplastic etching. The lens radius Rlens=57λ, focal length zf=20λ, corresponding to the numerical aperture of NA=0.944. The optical field distribution of the super-resolution metalens was measured experimentally by a large-numerical-aperture microscopy system. The results show that, at the focal plane, the FWHM of the focal spot is 0.45λ, which is less than the diffraction limit of 0.53λ (the diffraction limit is 0.5λ/NA), the side-lobe ratio SR is 0.07, and the depth of focus is 0.4λ. Our proposed metalens can achieve a small depth of focus, a weak sidelobe ratio, and super-resolution point focusing. Our proposed super-resolution metalens bears the potential to realize the miniaturization, lightweight, and integration of super-resolution optical devices or systems.

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  • 图 1  硅基超构透镜。(a) 硅基长条形超原子示意图；(b) 聚焦示意图

    Figure 1.  Silicon-based metalens. (a) Schematic diagram of silicon-based metaatoms; (b) Schematic diagram of the focusing

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    图 2  弱旁瓣超分辨透镜优化流程图

    Figure 2.  Flowchart of the optimization process to achieve super-resolution focusing with weak sidelobes

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    图 3  硅基超构透镜理论设计结果。(a) 焦平面光场二维分布；(b) 焦平面强度曲线；(c) xz平面光场二维分布；(d) xz平面轴上聚焦光斑强度(红色实线)，半高全宽FWHM (蓝色实线)和旁瓣比SR (绿色实线)参数曲线

    Figure 3.  Theoretical results of silicon-based metalens. (a) Two-dimensional intensity distribution in the focal plane; (b) The corresponding intensity curve in the focal plane; (c) Two-dimensional intensity distribution on xz plane; (d) Intensity (red), FWHM (blue), and SR (green) parameter on the xz plane

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    图 4  硅基超构透镜FDTD仿真结果。(a) 焦平面光场二维分布；(b) 焦平面强度曲线；(c) xz平面光场二维分布；(d) xz平面轴上聚焦光斑强度(红色实线)，半高全宽FWHM (蓝色实线)和旁瓣比SR (绿色实线)参数曲线

    Figure 4.  FDTD simulation results of silicon-based metalens. (a) Two-dimensional intensity distribution in focal plane; (b) Focal plane intensity curve; (c) Two-dimensional intensity distribution on xz plane; (d) Focal spot intensity (red), FWHM (blue) and SR (green) parameter curves on the xz plane

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    图 5  超构透镜电镜图与实验测试原理图。(a) 超构透镜电镜图；(b) 基于大数值孔径显微系统光场实验测试示意图

    Figure 5.  The SEM and experimental schematic of metalens. (a) The SEM of the metalens; (b) Experimental schematic based on optical microscopy system with a large numerical-aperture objective

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    图 6  硅基超构透镜焦平面实验结果。(a) 焦平面光场二维分布；(b) 焦平面实验测试沿x轴(绿色)，y轴(蓝色)强度曲线，实验测试平均强度曲线(红色)和设计结果强度曲线(黑色)

    Figure 6.  Experimental results of silicon-based metalens on the focal plane. (a) Two-dimensional intensity distribution on the focal plane; (b) The corresponding intensity curves along the x-axis (green) and y-axis (blue), mean intensity curves (red) and the design results (black)

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    图 7  硅基超构透镜xz平面实验(红色)与设计(绿色)结果。(a) xz平面光场二维分布；(b) 强度；(c) 半高全宽FWHM；(d) 旁瓣比SR

    Figure 7.  Experimental (red) and design (green) results of silicon-based metalens on the xz plane. (a) Two-dimensional Intensity distribution on the xz plane; (b) The corresponding intensity; (c) FWHM; (d) Sidelobe ratio

    下载: 全尺寸图片 幻灯片
    下载: 全尺寸图片 幻灯片

    表 1  超构透镜相位数Ni

    Table 1.  Phase number of the metalens

    环带序号Ni
    #01~#380059MTL9K000OG0M0904T0MOC08AKDS61ALLOG
    #39~#764000C7CSFCEQIPQQM0F00GIN46A3C7JA30B2N7
    #77~#11507A02F5K2NC2B2J9H102070B00208I6N8RB0EUF
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收稿日期:  2022-10-11
修回日期:  2022-11-01
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