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Electrons dynamics control micro-hole drilling using temporally/spatially shaped femtosecond laser
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摘要:
微孔作为一种常见结构，被广泛应用于生物医疗、航空航天、三维封装等领域。飞秒激光具有的超短脉冲持续时间和超高峰值功率特性使其在高质量微孔加工方面具有独特优势。本文综述了近年来飞秒激光时空整形微孔加工方法及其应用，包括飞秒激光时空整形方法、时域/空域整形的电子动态调控微孔加工以及微孔在增透减反、切割以及油水分离、雾气收集、气体收集等方面的应用，并讨论了时空整形飞秒激光微孔加工目前所面临的挑战和未来研究方向。
Abstract:As a common structure, microholes are widely used in various fields, including biomedical, aerospace, 3D packaging and so on. Femtosecond laser has unique advantages in drilling high-quality microhole due to its ultra-short pulse duration and ultra-high peak power. This review covers temporally/spatially shaped femtosecond laser microhole drilling methods and their applications over the past decade, including femtosecond laser temporally/spatially shaped methods, temporally/spatially shaped femtosecond laser microhole drilling based on electrons dynamics control, and the applications of microhole in transmittance enhancement and anti-reflection, material cutting, oil/water separation, fog collection and gas collection. Furthermore, present challenges and future research opportunities in this field are analyzed.
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Overview: As a common structure, microholes are widely used in biomedical, microfluidic devices, aerospace and 3D packaging fields. As the performance requirements of various functional devices are more and more strict in practical applications, the requirements for the quality and depth-diameter ratio of microhole processing also become much higher, which makes the microhole processing in manufacturing extremely challenging. In view of the increasingly strict requirements of microhole indicators, selecting a suitable microhole processing method is the key.
At present, the commonly used microhole drilling methods are mechanical drilling, electric spark drilling, electron beam drilling, focused ion beam drilling, laser drilling and electro discharge machining (EDM). Mechanical drilling is easy to operate, but it is difficult to process microholes with small diameters and high depth-diameter ratios. EDM drilling is only suitable for conductive materials and is difficult to process. Electron beam and focused ion beam drilling can achieve micro holes with nanometer to submicron precision, but the conditions are harsh. The equipment is expensive, and the processing efficiency is slow. Laser drilling has the characteristics of non-contact, wide material adaptability and high processing efficiency, but the microholes processed by continuous laser and long pulse laser have a certain heat affected zone.
Femtosecond laser is different from the continuous laser and long pulse laser. It has characteristics of ultra-short pulse duration and ultra-high peak power, enabling high-quality processing capacity and wide material adaptability. Compared with traditional processing methods, femtosecond laser has the following three significant advantages: (1) Small thermal effect and high processing quality; (2) Strong nonlinear effect, wide range of material processing and higher processing resolution; (3) The "true" 3D processing. When the femtosecond laser is focused inside the transparent medium, only the material near the focal point can be modified or removed, so the "true" 3D machining of arbitrary complex structures can be achieved with femtosecond laser. Therefore, femtosecond laser provides a new possibility for high-quality microhole drilling. Unshaped Gaussian laser microhole drilling has the contradiction between small diameters and high depth-diameter ratios. Due to the precise and adjustable properties of femtosecond laser, its light field distribution can be controlled in terms of transient local electronic dynamic and subsequent phase transitions by temporally/spatially shaping. In this way, the microhole can be drilled to satisfy the requirements of both small diameter and high depth-diameter ratio.
In this paper, the processing methods regarding electrons dynamics control micro-hole drilling using temporally/spatially shaped femtosecond laser and the applications of microholes in transmittance enhancement and anti-reflection, material cutting, oil and water separation, fog collection and gas transportation are reviewed.
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图 1 不同脉宽激光叩击加工钢箔。
Figure 1. Percussion drilling on steel foil with different laser pulse durations.
图 2 时域整形光路示意图。
Figure 2. Schematic diagram of the experimental optical paths for temporally shaping.
图 3 空间整形光路示意图。
Figure 3. Schematic diagram of the experimental optical paths for spatially shaping.
图 4 飞秒激光时域整形微孔加工。
Figure 4. Microholes drilling by temporally shaping femtosecond laser.
图 6 飞秒激光加工亚波长微孔阵列在增透减反方面的应用。
Figure 6. Application of femtosecond laser drilling sub-wavelength microhole arrays in transmittance enhancement and anti-reflection.
图 7 飞秒激光微孔加工在切割方面的应用。
Figure 7. Application of femtosecond laser microhole drilling in material cutting.
图 8 飞秒激光微孔加工技术也被应用到油水分离、雾气收集、气体运输等方面。
Figure 8. Femtosecond laser microhole drilling technology has also been applied to oil and water separation, fog collection, gas transportation.
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