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摘要
由于光谱仪的尺寸限制，微型光谱仪在满足一定光谱范围时，其分辨力往往难以小于0.1 nm。而一些特殊应用场合要求光谱仪不仅具有微小的尺寸，还要求具有极高的光谱分辨力。本文基于Zemax光学设计软件，通过选择合适的初始结构参数与评价函数，自动优化准直镜、聚焦镜、柱透镜、光栅，以及CCD间倾角和距离，设计出光谱分辨力高达0.05 nm，尺寸为90 mm×130 mm×40 mm的Czerny-Turner结构微型光谱仪。在此基础上优化出8个光栅倾斜角度，使微型光谱仪光谱分辨力在优于0.05 nm的同时，波段范围达到了820 nm~980 nm。所设计的光谱仪具有超高的光谱分辨力、微小的外形尺寸与适中的光谱范围等特点。
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关键词:
- 微型光谱仪 /
- 光谱分辨力 /
- Czerny-Turner结构 /
- Zemax
Abstract
Because of the size limit of the spectrometer, the resolution of the micro-spectrometer is usually difficultly less than 0.1 nm when it meets certain spectral range. While some special applications require that the spectrometer not only has small size, but also requires extremely high spectral resolution. We used Zemax (optical design software) to choose the initial structure parameters and evaluation function to automatically optimize angle and distance of focus lens, cylindrical lens and CCD to design an optical system of spectrometer of Czerny-Turner structure. Its resolution is better than 0.05 nm, and the volume of the system is 90 mm×130 mm×40 mm. On this basis, eight grating slanting angles were optimized, and the spectral resolution of the micro-spectrometer is better than 0.05 nm, while the band range reaches 820 nm~980 nm. So the spectrometer has the characteristics of high resolution, wide spectrum and small volume.
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Key words:
- micro-spectrometer /
- resolution /
- Czerny-Turner structure /
- Zemax
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Overview
Overview: The spectrum can reflect the molecular structure information of substances and plays an important role in the fields of biology, chemistry, pharmaceutical materials, food industry and geological exploration. With the development of science and technology, a large number of frontier disciplines cross, infiltrate and fuse. A series of requirements that include wide spectrum, high resolution and miniaturization of spectrometer are proposed, thus the micro spectrometer has been concerned tremendously. Nowadays, the spectrometer has many light path structures. Czerny-Turner light path structure not only avoids the secondary or multiple diffraction, but also facilitates the optical element processing and the loading. It has a wide measuring range, simple structure, low cost and so on, so it is widely used in micro spectrometer. In recent years, researchers at home and abroad have done a lot of researches on the design and performance of micro-spectrometer. However, the resolution of spectrometer is generally more than 0.3 nm, which cannot meet some areas with high resolution. When researchers detect imaging spectrum in the atmosphere in the edge, the spectrometer shall have a high resolution of 0.06 nm~0.08 nm, owing to the kinds of particles in the atmosphere and multi-component and the atmospheric humidity. In the determination of impurity elements in steel, the determination of other elements is caused by spectral interference when it exists in the matrix elements, owing to the complexity of impurity element spectrum and various spectral lines. In this case, a high resolution of the spectrometer is highly desired. In addition, the small-volume spectrometer is portable, making it more convenient for police departments to detect drugs, law enforcement departments to detect factory sewage and geologists to detect mineral composition on the spot.
We used Zemax (optical design software) to choose the initial structure parameters and evaluation function to automatically optimize angle and distance of focus lens, cylindrical lens and CCD to design an optical system of spectrometer of Czerny-Turner structure, whose resolution is better than 0.05 nm. Its numerical aperture is 0.1, and the volume of the system is 90 mm×130 mm×40 mm. On this basis, eight grating slanting angles were optimized, and the spectral resolution of the micro-spectrometer is better than 0.05 nm, while the band range reaches 820 nm~980 nm. The spectrometer has the characteristics of high resolution, wide spectrum and small volume.
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图 3 881 nm、889 nm、897 nm的波长处的点列图分开情况
Figure 3. The separated points at the wavelength of 881 nm, 889 nm and 897 nm
图 6 间隔为20 nm, 30 nm, 40 nm和50 nm的点列图
Figure 6. Spot diagrams with intervals of 20 nm, 30 nm, 40 nm and 50 nm
表 1 光学元件特征参量
Table 1. Specification of the optical elements
Optical element Parameters Value Collimating mirror f1 52.0825 mm D1 40 mm Condensing mirror f2 52.0825 mm D2 40 mm Diffraction grating λb 870 nm x 11 mm n 1200 line/mm Charge coupled device r 14.336 mm S 8 μm×200 μm 
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表 2 模拟参数
Table 2. Design table of the simulation parameters
Optical element Decenter Y/mm Tilt about X/(°) Entrance slit 0 7.600 Collimating mirror 10.904 34.000 Diffraction grating 19.992 3.000 Focusing mirror 37.000 30.808 Charge coupled device 37.997 15.346
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表 3 转动光栅后的实验结果
Table 3. Experimental results of rotating grating
Wavelength range/nm Angle of grating rotation/(°) Maximum of RMS
radius/μmTransmission efficiency of
optical system in MTF curve820~840 31.55 3.7 0.27/0.68 840~860 32.30 6.1 0.51/0.82 860~880 33.15 3.8 0.67/0.82 880~900 34.00 2.1 0.68/0.79 900~920 34.85 2.3 0.67/0.71 920~940 35.63 3.3 0.32/0.67 940~960 36.55 4.2 0.49/0.71 960~980 34.40 4.7 0.42/0.48
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