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摘要:
随着紫外光谱探测技术的广泛应用，低成本便携式紫外-可见光谱仪成为该领域的研究热点。本文首先依据交叉型Czerny-Turner结构设计了便携式紫外光谱仪光路结构。其次，针对性研究了紫外光谱仪的关键器件：紫外探测器和闪耀光栅。利用Lumogen荧光材料和蒸镀成膜法制作镀膜紫外增强CCD，并分析了荧光薄膜在CCD表面的位置对分辨率的影响；从理论上分析了闪耀光栅对于紫外波段的多级衍射效率的影响，确定了紫外光谱仪对于闪耀光栅的选择。最后，研制的便携式紫外-可见光谱仪样机的性能测试结果表明，200 nm~900 nm波段、25 μm狭缝宽度、600 lp/mm、300 nm闪耀光栅配置下分辨率整体小于1.5 nm，200 nm~300 nm紫外波段的光谱响应度提高到20%，实现了便携式紫外-可见光谱仪的设计要求。
Abstract:With the widespread application of ultraviolet spectroscopy, low-cost portable ultraviolet spectrometer has become a research focus in this field. Firstly, the optical structure of the portable UV-VIS spectrometer was designed based on the crossed-asymmetric Czerny-Turner structure in the paper. Secondly, the key devices of ultraviolet spectrometer, namely ultraviolet detectors and blazed gratings, were studied. The coated UV-enhanced CCDs were fabricated using Lumogen fluorescent materials and vacuum coating methods. The influence of the position on the CCD surface of the fluorescent film on the resolution was analyzed. The effect of blazed gratings on the multi-order diffraction efficiency in the ultraviolet region was theoretically studied. Finally, the test results of performance of a portable UV-VIS spectrometer prototype show that the resolution of the 200 nm~900 nm band, 25 μm slit width, 600 lp/mm, 300 nm blazed grating configuration is less than 1.5 nm and the spectral responsivity increases to 20% in the spectral range varying from 200 nm to 300 nm, which meets the design requirements of the portable UV-VIS spectrometer.
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Key words:
- UV-VIS spectrometer /
- Lumogen film /
- UV-enhanced /
- CCD /
- blazed grating /
- grating efficiency
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Overview: With the widespread application of ultraviolet spectral detection technology, low-cost portable ultraviolet spectrometer has become a research hotspot in this field. For example, in chemical detection, the electronic spectrum of most molecules, which are in the ultraviolet region, can characterize the chemical reaction of a substance. Various experiment and application researches can be carried out with the qualitative and quantitative analysis of the molecular electronic spectrum using a ultraviolet spectrometer, such as analyzing the molecular composition of the analyte or determining whether the substance has undergone a chemical reaction or not. Owing to the absorption of ultraviolet light by the silicon substrate in the detector, it is hard to generate signal charges in the detector for the ultraviolet light. Therefore, the conventional spectrometer has a very low response to the ultraviolet band. In order to improve the response of the spectrometer to the UV band, the spectrum of the spectrometer's response is broadened. This article uses a simple and convenient method to improve the traditional spectrometer so that it can measure ultraviolet band. Based on this method, a UV-visible portable spectrometer prototype was developed. The innovations of the method proposed in this paper mainly include the following two points. First, a layer of fluorescent film is evaporated on the surface of the detector to convert ultraviolet light into visible light, thereby improving the ultraviolet responsivity of the detector. Second, we optimize the performance of the components in the spectrometer, thus increasing the incident light energy in the UV band. The structure of this paper is organized as follows. First, the optical path of the traditional portable cross-type Czerny-Turner structure spectrometer was designed. Second, the key components of the UV spectrometer were studied, namely UV detectors and blazed gratings. UV-enhanced CCDs were fabricated using Lumogen fluorescent material and vapor deposition film-forming method. The influence of the position of the fluorescent film on the CCD surface was analyzed. Based on the effects of blazed gratings on the multi-order diffraction efficiency in the ultraviolet region, the choice of a blazed grating for the UV spectrometer was determined. Finally, we developed an improved portable UV-visible spectrometer prototype. The performance test results show that its overall resolution of 200 nm~900 nm band is less than 1.5 nm when using 25 μm slit width, 600 lp/mm, and 300 nm blazed grating configurations. The spectral responsivity of 200 nm~300 nm ultraviolet band is increased to 20%, and the signal-to-noise ratio rises by about 30 times, meeting the design requirements of the portable UV-visible spectrometer.
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图 1 交叉非对称型Czerny-Turner系统光路图
Figure 1. Layout of crossed-asymmetric Czerny-Turner system
图 3 优化后光谱仪光路
Figure 3. Optimized layout of the crossed-asymmetric Czerny-Turner spectrometer
图 6 镀膜CCD的参数测试曲线。(a) 253 nm紫外光入射CCD响应曲线；(b)镀膜CCD的光谱响应曲线
Figure 6. The parameter test curve of the coated CCD. (a) CCD response curves of 253 nm ultraviolet light incident; (b) Spectral response curves of coated CCD
图 7 不同闪耀波长的不同级次光栅效率曲线。(a) 500 nm的一级光栅效率曲线；(b) 300 nm的一级光栅效率曲线；(c) 500 nm的二级光栅效率曲线；(d) 300 nm的二级光栅效率曲线
Figure 7. Different order relative efficiency curves at different blaze wavelengths. First order relative efficiency curve at blaze wavelength of (a) 500 nm and (b) 300 nm; Second order relative efficiency curve at blaze wavelength of (c) 500 nm and (d) 300 nm
图 9 500 nm闪耀波长光栅的汞氩灯光谱。(a)镀膜前光谱图；(b)镀膜后光谱图
Figure 9. Hg-Ar spectra of blaze grating at blaze wavelength of 500 nm with (a) original CCD and (b) coated CCD
图 10 300 nm闪耀波长光栅的汞氩灯光谱。(a)镀膜前光谱图；(b)镀膜后光谱图
Figure 10. Hg-Ar spectra of blaze grating at blaze wavelength of 300 nm with (a) original CCD and (b) coated CCD
图 11 便携式紫外-可见光谱仪测试汞氩灯光谱。(a)便携式紫外-可见光谱仪汞氩灯光谱；(b) 253.652 nm的光谱图形；(c) 576.960 nm和579.066 nm的光谱图形
Figure 11. Hg-Ar spectrum with portable UV-VIS spectrometer. (a) Hg-Ar spectrum with portable UV-VIS spectrometer; (b) The spectrum of 253.652 nm; (c) The spectrum at 576.960 nm and 579.066 nm
表 1 光学元件参数
Table 1. Parameters of optical elements
Optical elements Parameters Value Slit a 25 μm Collimating mirror f1 38.7 mm Focusing mirror f2 70.8 mm Blazing grating n 600 lp/mm 
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表 2 优化后结构参量
Table 2. Parameters of optimized structure
Parameters Value i 24.8° θ 5.2° Φ 30° $\varphi $1 5.2° $\varphi $2 13° $\varphi $ -1.3° LSM1 37.8 mm LM1G 40 mm LGM2 40 mm LM2D 69.95 mm
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表 3 改进前后光谱仪中其它波长与546.074 nm光强的相对比
Table 3. The light intensity ratio between other wavelengths and 546.074 nm of spectrometer before and after improvement
Wavelength/nm Before improvement After improvement 253.652 0.03 1.32 296.728 0.03 0.11 313.155 0.04 0.34 365.015 0.45 0.48 546.074 1 1
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