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Research progress of ultrafast laser industrial applications based on filamentation
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摘要
激光成丝是超快激光在透明介质传输中的一种非线性光学现象，来源于光克尔效应引起的激光光束自聚焦与弱电离产生的等离子体散焦之间的动态平衡，对其超长传输物理特征非衍射性的调控在研发新一代超快激光材料加工技术上具有至关重要的作用。本文面向激光制造现代工程应用的发展需求，对基于光丝效应的激光高精加工研究现状进行了调研和总结，从激光成丝物理现象、基本机制和特征优势出发，介绍了超快激光在气、液及固体不同介质中光丝引导加工工艺的研发进展，对技术发展中的问题和前景进行了思考与分析。
Abstract
Ultrafast laser filamentation is an attractive nonlinear phenomenon as a consequence of dynamic balance between Kerr self-focusing and defocusing effect in the electron plasma generated through the ionization process. Achieving the regulation of the non-diffractive ultra-long transmission will play an important role in the development of novel ultrafast laser material processing technology. In this paper, the investigation on the research of ultrafast laser industrial application based on filamentation was introduced. From the physical feature, basic mechanism and characteristic advantages of filamentation effects, the representative research achievements on the laser applications of filamentary propagation induced by gas, liquid and solid different media were presented. The development problem and prospect of the technique were also considered and discussed.
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Key words:
- ultrafast laser /
- filamentation /
- transparent material /
- laser material processing
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Overview
The research progress of ultrafast laser industrial application based on filamentation effect is introduced. Ultrafast laser filamentation is an attractive nonlinear phenomenon as a consequence of dynamic balance between Kerr self-focusing and defocusing effect in the electron plasma generated through the ionization process. It has been observed for various laser wavelengths from the ultraviolet to the infrared domain and for the pulse durations from several tenth of femtosecond to picosecond. The optical intensity in the filamentary volume can become high enough to induce permanent structural modifications which can be utilized in material processing with high precision and some special features. The basic characteristics and the theoretical modes of the filament propagation were described briefly for better understanding the effect. However, the main emphasis of the paper is on the laser industrial application from filamentation effect which is found as a promising and exploring research field in recent years. To achieve non-diffractive ultra-long transmission of filament propagation will play an important role in the development of the novel ultrafast laser material processing technology. From the physical feature, basic mechanism and characteristic advantages of filamentation effects, the representative research achievements on the laser applications of filamentation induced in gas, liquid and solid different media were presented. It is demonstrated that laser filamentation induced in gas provides high intensity plasma strings of micrometric diameters and lengths of tens of centimeters which can achieve remotely drilling, cutting and milling of metals, biological materials, ceramics and single crystal (sapphire). Complex 3D shapes can be machined without any adjustment of the technique because the processing is carried out under defocusing condition. Micromachining techniques of cutting and welding by water acting as a medium for filament formation were introduced afterwards. Filament formation in water leads to decrease of the focal spot diameter and increases of fluence and axial focal length, which is capable of drilling holes in thick soda-lime and hardened glasses, even for complex –shape fabrication. Filament formation at the interface of two glass samples was also used for welding applications. By varying repetition rate, scanning speed and focal position optimal conditions, strong glass welding via filamentation were obtained. The development problem and prospect of the technique were also considered and discussed. Ultrafast laser processing using filamentation must be a versatile technique in the future industrial material machining because the material modification is initiated by nonlinear absorption with the advantages which is quite different from common ablation.
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图 3 皮秒激光在蓝宝石介质中的成丝现象.
Figure 3. Filamentation in sapphire irradiated by picosecond laser.
图 6 皮秒激光成丝加工实例图. (a)皮秒激光成丝铣削工艺过程. (b)皮秒激光成丝三维铣削型面实例. (c)皮秒激光成丝加工蓝宝石切面.
Figure 6. Samples fabricated by picosecond laser filamentation machining. (a) Machining process. (b) 3D milling sample. (c) Cut surface sample of fabricated sapphire.
图 8 超快激光水介光丝切割实验[38, 39]. (a)实验装置架构图. (b)，(c) 1 mm厚钠-钙玻璃复杂切割件SEM图. (d), (e)水膜厚度、激光工艺参数分析.
Figure 8. Cutting process of ultra-fast laser filamentation in water[38, 39]. (a) Experimental set-up. (b), (c) Complex shape soda-lime glass cut samples. (d), (e) Thickness of water layer, laser parameters versus groove depth.
图 11 固体介质成丝微连接示意图[44]. (a)将一个样品放在另一个样品上并加压. (b)飞秒脉冲激光聚焦于界面并平移样品. (c)样品连接. (d)飞秒激光辐照后样品俯视(xy平面)和侧视(xz平面)显微图.
Figure 11. Schematic diagrams of laser joining process of filamentation in solid media[44]. (a) Place one sample on another and press together. (b) Focus femtosecond laser pulses at the interface and translate the samples. (c) Join the samples. (d) Photomicrographs of top view (xy plane) and side view (yz plane) after femtosecond laser joining.
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