高亮度蓝光半导体激光器光纤耦合技术

段程芮, 赵鹏飞, 王旭葆, 等. 高亮度蓝光半导体激光器光纤耦合技术[J]. 光电工程, 2021, 48(5): 200372. doi: 10.12086/oee.2021.200372
引用本文: 段程芮, 赵鹏飞, 王旭葆, 等. 高亮度蓝光半导体激光器光纤耦合技术[J]. 光电工程, 2021, 48(5): 200372. doi: 10.12086/oee.2021.200372
Duan C R, Zhao P F, Wang X B, et al. Fiber coupling technology of high brightness blue laser diode[J]. Opto-Electron Eng, 2021, 48(5): 200372. doi: 10.12086/oee.2021.200372
Citation: Duan C R, Zhao P F, Wang X B, et al. Fiber coupling technology of high brightness blue laser diode[J]. Opto-Electron Eng, 2021, 48(5): 200372. doi: 10.12086/oee.2021.200372

高亮度蓝光半导体激光器光纤耦合技术

  • 基金项目:
    国家重点研发基金资助项目(2017YFB0405001)
详细信息
    作者简介:
    *通讯作者: 王旭葆(1972-),男,博士,副研究员,硕士生导师,主要从事半导体激光器及固体激光器方面的研究. E-mail: wangxubao@bjut.edu.cn 林学春(1978-),男,博士,研究员,博士生导师,主要从事高功率全固态激光器及其应用技术的研究. E-mail: xclin@semi.ac.cn
  • 中图分类号: TN248.4

Fiber coupling technology of high brightness blue laser diode

  • Fund Project: National Key R & D Fund Projects (2017YFB0405001)
More Information
  • 随着蓝光半导体激光器的发展和应用范围的拓宽,利用合束技术来获得高亮度的蓝光光源已经成为研究的热点。为了获取高亮度的蓝光输出,本文应用光学设计软件进行模拟仿真,将48只波长为450 nm、输出功率为3.5 W的单管半导体激光器通过快慢轴准直和空间合束,聚焦耦合进105 μm/0.22NA的光纤中,可获得功率为144.7 W、亮度为11 MW/(cm2·str)的蓝光输出,耦合效率为93.78%,整体系统的光-光转换效率为86.13%。

  • Overview: Blue laser diodes (LDs) having the advantages of compact construction, long operating lifetime, and short-wavelength are extremely attractive for many applications, such as laser display, material processing, etc. To date, it has become one of the favorable lasers in welding copper-based alloy materials because the blue light absorption rate is 5~12 times greater than that of the near-infrared light for such materials. However, the highest output power of commercialized blue LDs is only 5 W. It cannot be used directly in laser welding unless the needed high-power output can be achieved by combining hundreds of such blue LDs. In 2020, NUBURU, an American company, showed 1500 Watts of blue laser output from a 100 μm core, NA=0.22 fiber for the first time. It is the highest level of output brightness of blue diode lasers so far in the world. Some achievements have also been made in China in recent years, and BWT Corporation has developed a blue laser with an output power of 500 W from a 400 μm core fiber with a 0.22 NA. However, the output brightness of laser seems to be insufficient for laser welding.

    In this paper, we designed a high brightness blue LD module by using optical design software ZEMAX, where 48 blue LDs with 3.5 W output power were combined into a beam and efficiently coupled into a fiber with 105 μm core, 0.22 NA. Because of the large divergences, collimation was implemented before beam combination. The fast and slow axis collimating lenses with effective focal lengths of 1.65 mm and 16 mm are used. After that, the spot size of the fast and slow axis is 1.5 mm×4 mm, and the divergence half-angle is 0.043°×0.06°. Multiple such beams were spatially combined. To further improve the output power without deteriorating the beam quality, the polarization beam combining technology was used to double the output power. By theoretical analysis of fiber coupling conditions, four arrays constituted by combined beams, which are 6×3, 7×3, 8×3, and 9×3 arranged in fast and slow axis, are obtained. The output power and coupling efficiency of these four arrays are 108.97 W/94.18%, 126.83 W/93.93%, 144.7 W/93.78%, and 157.91 W/91%. The combination of 6×3 completely meets the fiber coupling conditions, and the focused light spot completely falls into the fiber core. But the latter three arrays cannot fully meet the fiber coupling conditions, and the focused light spot cannot entirely fall into the fiber core. If we regarded the coupling loss of 6×3 array as a reference, and the relative losses of the arrays of 7×3, 8×3 and 9×3 are 0.27%, 0.42%, and 3.38%, respectively. It can be seen that the 8×3 array is a better choice because the coupling loss only increases by 0.42%, but the output power increases by 32.7% compared with the 6×3 array. The output brightness is calculated to be 11 MW/(cm2·str). The total optical to optical conversion efficiency is 86.13%. As a result, the output power is further improved by slightly increasing the coupling loss, which provides a technical reference for making high brightness fiber-coupled LD modules in the future.

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  • 图 1  蓝光LD的远场输出特性。

    Figure 1.  The far field output characteristics of blue LD.

    图 2  快轴准直光路图

    Figure 2.  The light path diagram of fast axis collimation

    图 3  慢轴准直光路图

    Figure 3.  The light path diagram of slow axis collimation

    图 4  准直后光斑图

    Figure 4.  The spot diagram after collimation

    图 5  空间合束原理图

    Figure 5.  The schematic diagram of spatial beam combination

    图 6  偏振合束原理图

    Figure 6.  The schematic diagram of polarization beam combination

    图 7  角度填充系数与耦合条件关系图。(a) 不满足;(b) 满足

    Figure 7.  The relationship between angle filling factor and coupling condition.(a) Not satisfied; (b) Satisfied

    图 8  光纤耦合光路图

    Figure 8.  The optical path diagram of fiber coupling

    图 9  空间合束后光斑图

    Figure 9.  The spot diagrams after space beam combination

    图 10  聚焦后光斑的大小

    Figure 10.  The spot size after focusing

    图 11  光纤光斑大小图

    Figure 11.  The spot size diagram of optical fiber

    表 1  蓝光LD的主要参数

    Table 1.  The main parameters of blue LDs

    Parameter Symbol Type
    Center wavelength/nm λd 450
    Half angle divergence of fast axis/(°) θfast 22.5
    Half divergence angle of slow axis/(°) θslow 7
    Light-emitting size of fast axis/µm Dfast 1
    Light-emitting size of slow axis/µm Dslow 30
    Output power/W P 3.5
    下载: 导出CSV

    表 2  准直前后快慢轴的光束参数

    Table 2.  The beam parameters of fast and slow axis before and after collimation

    D/mm θ/mrad BPP/(mm·mrad)
    Before fast axis collimation 0.001 392.699 0.196
    After fast axis collimation 1.5 0.75 0.563
    Before slow axis collimation 0.03 122.173 1.833
    After slow axis collimation 4 1.047 2.09
    下载: 导出CSV

    表 3  快轴单管数量变化时耦合输出参数对比

    Table 3.  The comparison of various parameters for the number of LDs in the fast axis

    m×n The output power of optical fiber coupling/W Coupling efficiency/% Relative loss/%
    6×3 108.97 94.18 0
    7×3 126.83 93.93 0.27
    8×3 144.7 93.78 0.42
    9×3 157.91 91 3.38
    下载: 导出CSV
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出版历程
收稿日期:  2020-10-16
修回日期:  2021-03-18
刊出日期:  2021-05-15

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