五自由度测量中直线度现场标定方法研究

苏宇浩,段发阶,蒋佳佳,等. 五自由度测量中直线度现场标定方法研究[J]. 光电工程,2020,47(9):190451. doi: 10.12086/oee.2020.190451
引用本文: 苏宇浩,段发阶,蒋佳佳,等. 五自由度测量中直线度现场标定方法研究[J]. 光电工程,2020,47(9):190451. doi: 10.12086/oee.2020.190451
Su Y H, Duan F J, Jiang J J, et al. Research on field calibration method of straightness in five-degree-of-freedom measurement[J]. Opto-Electron Eng, 2020, 47(9): 190451. doi: 10.12086/oee.2020.190451
Citation: Su Y H, Duan F J, Jiang J J, et al. Research on field calibration method of straightness in five-degree-of-freedom measurement[J]. Opto-Electron Eng, 2020, 47(9): 190451. doi: 10.12086/oee.2020.190451

五自由度测量中直线度现场标定方法研究

  • 基金项目:
    国家重点研发计划资助项目(2017YFF0204800);天津市自然科学基金资助项目(17JCQNJC01100);水下信息与控制重点实验室开放研究资助项目(6142218081811);装备预研领域基金资助项目(61405180505, 61400040303);国家自然科学基金资助项目(51775377, 61505140);中国科协“青年人才托举工程”资助项目(2016QNRC001)
详细信息
    作者简介:

    苏宇浩(1996-),男,硕士,主要从事光电检测的研究。E-mail:suyuhao@tju.edu.cn

    通讯作者: 蒋佳佳(1986-),男,博士,副教授,主要从事激光及光电测试技术、水生检测等的研究。E-mail:jiajiajiang@tju.edu.cn
  • 中图分类号: TH741

Research on field calibration method of straightness in five-degree-of-freedom measurement

  • Fund Project: Supported by National Key R&D Program of China (2017YFF0204800), the Tianjin Natural Science Foundations of China (17JCQNJC01100), Science and Technology on Underwater Information and Control Laboratory (6142218081811), Equipment Pre-Research Field Fund (61405180505, 61400040303), National Natural Science Foundations of China (51775377, 61505140), Young Elite Scientists Sponsorship Program By China Association for Science and Technology (2016QNRC001)
More Information
  • 直线度现场标定是保证其在线测量精度的重要方法。在收发一体式激光五自由度测量结构的基础上,针对直线度现场标定中标定平台引入的阿贝误差和角锥棱镜成像误差,建立了直线度现场标定模型。根据该标定模型并结合五自由度测量装置的角度测量结果,提出一种直线度现场标定误差补偿方法。实验表明,该标定方法使标定系数误差减小到0.2%以内,有效提高了直线度现场标定精度。

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  • 图 1  五自由度测量结构

    Figure 1.  The five-degree-of-freedom measurement structure

    图 2  QPD1的X向输出标定原理图

    Figure 2.  Schematic diagram of X-direction output calibration of QPD1

    图 3  QPD1的Z向输出标定原理图

    Figure 3.  Schematic diagram of Z-direction output calibration of QPD1

    图 4  阿贝偏位示意图

    Figure 4.  Diagram of Abbe deviation

    图 5  RR1展开图

    Figure 5.  Diagram of RR1 expansion

    图 6  RR1的成像误差

    Figure 6.  Imaging error of RR1

    图 7  QPD1的X向输出标定系统

    Figure 7.  Calibration system of X-direction output of QPD1

    图 8  高精度标定平台标定结果

    Figure 8.  Calibration results of high precision calibration platform

    图 9  低精度标定平台标定结果。(a)补偿前; (b)补偿后

    Figure 9.  Calibration results of low precision calibration platform. (a) Before compensation; (b) After compensation

    图 10  QPD1的Z向输出标定系统

    Figure 10.  Calibration system of Z-direction output of QPD1

    图 11  高精度标定平台标定结果

    Figure 11.  Calibration results of high precision calibration platform

    图 12  低精度标定平台标定结果。(a)补偿前;(b)补偿后

    Figure 12.  Calibration results of low precision calibration platform. (a) Before compensation; (b) After compensation

    图 13  二维直线度测量对比实验系统

    Figure 13.  Measurement and comparison experiment system of two-dimension straightness

    图 14  二维直线度测量对比实验结果。(a) X向直线度;(b) Z向直线度

    Figure 14.  Measurement and comparison experiment results of two-dimension straightness. (a) Straightness along X axis; (b) Straightness along Z axis

    表 1  高精度标定平台标定数据

    Table 1.  Calibration data of high precision calibration platform

    激光干涉仪测量值∆dx'/μm QPD1 X向输出测量值∆xQ
    -125.1 -109.192
    -99.48 -86.972
    -74.77 -65.187
    -49.36 -42.669
    -24.95 -21.426
    0.00 0.000
    25.58 21.682
    49.99 42.886
    75.41 65.364
    100.15 87.189
    125.23 109.037
    下载: 导出CSV

    表 2  低精度标定平台标定数据

    Table 2.  Calibration data of low precision calibration platform

    激光干涉仪测量值∆dx'/μm QPD1 X向输出测量值∆xQ 偏摆角测量值εzx/(μm/m)
    -123.85 -112.824 -658
    -99.4 -90.429 -525
    -74.05 -67.054 -380
    -49.66 -44.541 -260
    -24.02 -21.265 -129
    0.00 0.000 0
    24.98 22.105 107
    50.17 44.647 223
    76.21 68.135 336
    101.08 90.835 452
    126.08 113.493 518
    下载: 导出CSV

    表 3  高精度标定平台标定数据

    Table 3.  Calibration data of high precision calibration platform

    激光干涉仪测量值∆dz'/μm QPD1 Z向输出测量值∆zQ
    -124.65 -112.888
    -100.2 -90.493
    -74.85 -67.118
    -50.46 -44.305
    -24.82 -21.329
    -0.8 -0.064
    24.18 22.041
    49.37 44.583
    75.41 68.071
    100.28 91.171
    125.28 113.929
    下载: 导出CSV

    表 4  低精度标定平台标定数据

    Table 4.  Calibration data of low precision calibration platform

    激光干涉仪测量值∆dz'/μm QPD1 Z向输出测量值∆zQ 偏摆角测量值εxz/(μm/m)
    -125.07 -118.527 -203
    -100.21 -94.950 -207
    -74.75 -70.262 -153
    -50.16 -46.593 -108
    -25.01 -22.453 -58
    -0.2 1.161 -3
    24.99 24.487 27
    50.41 47.717 58
    75.29 70.558 86
    100.41 93.942 111
    124.89 117.077 134
    下载: 导出CSV
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出版历程
收稿日期:  2019-07-30
修回日期:  2019-11-08
刊出日期:  2020-09-15

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